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Improved emitter performance of RIE black silicon through the application of in-situ oxidation during POCl3 diffusion
Tsun Hang Fung*, Toni P. Pasanen, Yu Zhang, Anastasia Soeriyadi, Ville Vähänissi, Giuseppe Scardera, David Payne, Hele Savin, Malcolm Abbott
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
21
Citations
(Scopus)