Improved emitter performance of RIE black silicon through the application of in-situ oxidation during POCl3 diffusion

Tsun Hang Fung*, Toni P. Pasanen, Yu Zhang, Anastasia Soeriyadi, Ville Vähänissi, Giuseppe Scardera, David Payne, Hele Savin, Malcolm Abbott

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Improved emitter performance of RIE black silicon through the application of in-situ oxidation during POCl<sub>3</sub> diffusion'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science