Improved emitter performance of RIE black silicon through the application of in-situ oxidation during POCl3 diffusion

Tsun Hang Fung*, Toni P. Pasanen, Yu Zhang, Anastasia Soeriyadi, Ville Vähänissi, Giuseppe Scardera, David Payne, Hele Savin, Malcolm Abbott

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)

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Engineering & Materials Science

Chemistry