Abstract
Vacuum arc ablation is shown to be a new deposition technique for depositing YBCO thin films in situ with zero resistance below 85 K. A high deposition rate was achieved from small specimens. The size of macroparticles is larger than for laser ablation for the same target material, but a curved solenoidal filter was used to reduce the macroparticle content.
Original language | English |
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Pages (from-to) | 2353-2354 |
Number of pages | 2 |
Journal | Physica B: Physics of Condensed Matter |
Volume | 194-196 |
Issue number | Part 2 |
DOIs | |
Publication status | Published - 2 Feb 1994 |