Increased lateral resolution of spheres and aspheres through subaperture stitching interferometry

C. Supranowitz; J. Fleig; G. Forbes; A. Kulawiec; D. Miladinovic; P. Murphy

Increased lateral resolution of spheres and aspheres through subaperture stitching interferometry

C. Supranowitz, J. Fleig, G. Forbes, A. Kulawiec, D. Miladinovic, P. Murphy

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

Optical surface specifications that prescribe the allowable error as a function of spatial frequency, such as limits on the PSD or local slope, are becoming more common. It is often important to characterize errors on an optical surface that range in size from the wavelength of light all the way up to the size of the optic. A range of instruments is required to accurately measure surface errors over this full spectrum and a typical optics shop has gaps in coverage. High-resolution subaperture stitching is one way to extend an instrument's spatial frequency measurement capability and close a problematic gap in this coverage. An explanation of how stitching increases resolution will be discussed and examples will be given that show the benefits of stitching over full-aperture metrology.

Original language	English
Title of host publication	Proceedings - ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010
Place of Publication	Washington, DC
Publisher	SPIE
Pages	26-31
Number of pages	6
Volume	49
ISBN (Print)	9781887706544
Publication status	Published - 2010
Externally published	Yes
Event	ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010 - Asheville, NC, United States Duration: 23 Jun 2010 → 25 Jun 2010

Other

Other	ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010
Country/Territory	United States
City	Asheville, NC
Period	23/06/10 → 25/06/10

Cite this

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title = "Increased lateral resolution of spheres and aspheres through subaperture stitching interferometry",

abstract = "Optical surface specifications that prescribe the allowable error as a function of spatial frequency, such as limits on the PSD or local slope, are becoming more common. It is often important to characterize errors on an optical surface that range in size from the wavelength of light all the way up to the size of the optic. A range of instruments is required to accurately measure surface errors over this full spectrum and a typical optics shop has gaps in coverage. High-resolution subaperture stitching is one way to extend an instrument's spatial frequency measurement capability and close a problematic gap in this coverage. An explanation of how stitching increases resolution will be discussed and examples will be given that show the benefits of stitching over full-aperture metrology.",

author = "C. Supranowitz and J. Fleig and G. Forbes and A. Kulawiec and D. Miladinovic and P. Murphy",

year = "2010",

language = "English",

isbn = "9781887706544",

volume = "49",

pages = "26--31",

booktitle = "Proceedings - ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010",

publisher = "SPIE",

address = "United States",

note = "ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010 ; Conference date: 23-06-2010 Through 25-06-2010",

}

Supranowitz, C, Fleig, J, Forbes, G, Kulawiec, A, Miladinovic, D & Murphy, P 2010, Increased lateral resolution of spheres and aspheres through subaperture stitching interferometry. in Proceedings - ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010. vol. 49, SPIE, Washington, DC, pp. 26-31, ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010, Asheville, NC, United States, 23/06/10.

Increased lateral resolution of spheres and aspheres through subaperture stitching interferometry. / Supranowitz, C.; Fleig, J.; Forbes, G. et al.
Proceedings - ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010. Vol. 49 Washington, DC: SPIE, 2010. p. 26-31.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

TY - GEN

T1 - Increased lateral resolution of spheres and aspheres through subaperture stitching interferometry

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AU - Fleig, J.

AU - Forbes, G.

AU - Kulawiec, A.

AU - Miladinovic, D.

AU - Murphy, P.

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AB - Optical surface specifications that prescribe the allowable error as a function of spatial frequency, such as limits on the PSD or local slope, are becoming more common. It is often important to characterize errors on an optical surface that range in size from the wavelength of light all the way up to the size of the optic. A range of instruments is required to accurately measure surface errors over this full spectrum and a typical optics shop has gaps in coverage. High-resolution subaperture stitching is one way to extend an instrument's spatial frequency measurement capability and close a problematic gap in this coverage. An explanation of how stitching increases resolution will be discussed and examples will be given that show the benefits of stitching over full-aperture metrology.

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SP - 26

EP - 31

BT - Proceedings - ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010

PB - SPIE

CY - Washington, DC

T2 - ASPE Summer Topical Meeting on Precision Interferometric Metrology, ASPE 2010

Y2 - 23 June 2010 through 25 June 2010

ER -

Increased lateral resolution of spheres and aspheres through subaperture stitching interferometry

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