Abstract
Because of its high mobility, indium nitride is emerging as a “hot” material for potential application in nitride based high power, high frequency transistor devices. The best quality indium nitride ever grown was produced at Macquarie University in the early 1980’s by RF sputtering. The belief since that time has been that the background n-type carrier concentration of this sputtered material is due to nitrogen vacancies. Using measurements made by Elastic Recoil Detection analysis, with an incident beam of 200 MeV Au ions, it is shown that this material is actually grown nitrogen rich with the nitrogen on indium anti-site defect being the most probable origin of the high n-type conductivity commonly observed. Raman measurements confirm the revised model.
Original language | English |
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Title of host publication | Physics and industry working together |
Subtitle of host publication | proceedings of the Australian Institute of Physics 15th Biennial Congress 2002 |
Editors | David Neilson |
Place of Publication | Adelaide |
Publisher | Causal Productions |
Pages | 340-342 |
Number of pages | 3 |
ISBN (Print) | 095980644X |
Publication status | Published - 2002 |
Event | Australian Institute of Physics National Congress (15th : 2002) - Sydney Duration: 8 Jul 2002 → 11 Jul 2002 |
Conference
Conference | Australian Institute of Physics National Congress (15th : 2002) |
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City | Sydney |
Period | 8/07/02 → 11/07/02 |