Initial results for epitaxial growth of InN on gallium oxide and improved Migration-Enhanced Afterglow Epitaxy growth on gallium nitride

Rositsa Gergova, Kenneth Scott Alexander Butcher, Peter W. Binsted, Daniela Gogova

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

In this paper, the authors report on epitaxial thin InN layers grown on commercially available undoped GaN buffer layers and on Ga2O 3 interlayers produced by Migration-Enhanced Afterglow Epitaxy (MEAglow). The InN layers reported here, also grown by the MEAglow technique, are 100-200 nm thick and have a measured absorption edge between 1.3 and 1.95 eV. Advancements in the growth process have now allowed the authors to improve the InN layers so that the growth has excellent two-dimensional morphology. Scanning electron microscope images show that terracing is strongly evident for samples grown on GaN templates. Atomic force microscopy shows a maximum height of the steps of about 2 nm. For the samples grown on Ga2O 3, crystal quality is superior to InN grown on AlN buffers with similar thicknesses. X-ray diffraction ω-2θ measurements indicate a full width of half maximum (FWHM) of 342-389 arcseconds for these extremely thin layers; a good part of this x-ray diffraction FWHM is likely due to residual strain between the InN and GaN or between the InN and oxide.

Original languageEnglish
Article number031207
Pages (from-to)1-5
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume32
Issue number3
DOIs
Publication statusPublished - 2014
Externally publishedYes

Fingerprint Dive into the research topics of 'Initial results for epitaxial growth of InN on gallium oxide and improved Migration-Enhanced Afterglow Epitaxy growth on gallium nitride'. Together they form a unique fingerprint.

Cite this