Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond

Paolo Olivero*, Sergey Rubanov, Patrick Reichart, Brant C. Gibson, Shane T. Huntington, James Rabeau, Andrew D. Greentree, Joseph Salzman, David Moore, David N. Jamieson, Steven Prawer

*Corresponding author for this work

Research output: Contribution to journalArticle

148 Citations (Scopus)

Abstract

A method for the fabrication of freestanding microstructures in bulk single-crystalline diamond was developed. The method takes advantage of the fact that ion irradiation of diamond followed by thermal annealing induces a phase transformation to amorphous carbon. MeV ion implantation followed by thermal annealing to create a buried sacrificial layer at a well-defined depth was also carried out in the method. Patterned milling with a focused ion beam (FIB) was used to expose defined regions of the sacrificial layer to selective chemical etching. The method has also great potential for the production of microresonators, beams for integration in MEMS with waveguide sensing, and whole classes of high-performance devices.

Original languageEnglish
Pages (from-to)2427-2430
Number of pages4
JournalAdvanced Materials
Volume17
Issue number20
DOIs
Publication statusPublished - 17 Oct 2005
Externally publishedYes

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