Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond

Paolo Olivero*, Sergey Rubanov, Patrick Reichart, Brant C. Gibson, Shane T. Huntington, James Rabeau, Andrew D. Greentree, Joseph Salzman, David Moore, David N. Jamieson, Steven Prawer

*Corresponding author for this work

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Engineering & Materials Science