Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond

Paolo Olivero^*, Sergey Rubanov, Patrick Reichart, Brant C. Gibson, Shane T. Huntington, James Rabeau, Andrew D. Greentree, Joseph Salzman, David Moore, David N. Jamieson, Steven Prawer

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review