Abstract
The effects of HBr partial pressure and buffer-gas flow rate on plasma kinetics are investigated by measuring their effects in the time behavior of the Cu ground state (Cu 2S 1/2) density. The recovery rate of Cu 2S 1/2 density during the interpulse period increases linearly with HBr partial pressure, when varying either the HBr or Ne mass flow rate. However, the free Cu density in the plasma only increases notably at increasing HBr mass flow rate. The behavior is explained using a simple model for the major production and loss fluxes of the species in the plasma which participate in the key Cu surface and kinetic reactions in the plasma tube.
Original language | English |
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Title of host publication | IQEC, International Quantum Electronics Conference Proceedings |
Place of Publication | Nice, France |
Pages | 161 |
Number of pages | 1 |
DOIs | |
Publication status | Published - 2000 |
Event | 2000 International Quantum Electronics Conference (IQEC 2000) - Nice, France Duration: 10 Sep 2000 → 15 Sep 2000 |
Other
Other | 2000 International Quantum Electronics Conference (IQEC 2000) |
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City | Nice, France |
Period | 10/09/00 → 15/09/00 |