We summaries the status of laser assisted chemical vapour deposition used for growth of GaN films. The principles behind the growth technique are discussed together with the characteristics of the resulting films.
|Title of host publication||Vacuum science and technology|
|Subtitle of host publication||nitrides as seen by the technology, 2002|
|Editors||Tanya Paskova, Bo Monemar|
|Place of Publication||Trivandrum, Kerala, India|
|Number of pages||11|
|Publication status||Published - 2003|