Laser-assisted growth of GaN films

E. M. Goldys, A. Afifuddin

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

Abstract

We summaries the status of laser assisted chemical vapour deposition used for growth of GaN films. The principles behind the growth technique are discussed together with the characteristics of the resulting films.
Original languageEnglish
Title of host publicationVacuum science and technology
Subtitle of host publicationnitrides as seen by the technology, 2002
EditorsTanya Paskova, Bo Monemar
Place of PublicationTrivandrum, Kerala, India
PublisherResearch Signpost
Pages469-479
Number of pages11
ISBN (Print)9788177361988
Publication statusPublished - 2003

Fingerprint Dive into the research topics of 'Laser-assisted growth of GaN films'. Together they form a unique fingerprint.

Cite this