Laser-assisted growth of GaN films

E. M. Goldys, A. Afifuddin

    Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

    Abstract

    We summaries the status of laser assisted chemical vapour deposition used for growth of GaN films. The principles behind the growth technique are discussed together with the characteristics of the resulting films.
    Original languageEnglish
    Title of host publicationVacuum science and technology
    Subtitle of host publicationnitrides as seen by the technology, 2002
    EditorsTanya Paskova, Bo Monemar
    Place of PublicationTrivandrum, Kerala, India
    PublisherResearch Signpost
    Pages469-479
    Number of pages11
    ISBN (Print)9788177361988
    Publication statusPublished - 2003

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