Laser assisted metalorganic chemical vapour deposition of Mg doped GaN on silicon, sapphire and GaAs

H. Y. Zuo*, Melissa J. Paterson, E. Goldys, T. L. Tansley, Afifuddin

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    Abstract

    Mg doped p-type GaN films intended for UV photodetector applications have been produced by using laser-induced metalorganic chemical vapour deposition at a low temperature of 600 °C. The hole mobilities obtained are up to 40 cm 2V -1s -1 at room temperature without any post growth treatment and rich photoluminescence spectra are typical. Three principal peaks at 2.95 eV, 2.6 eV and 2.2 eV were observed at low temperature with only those at 2.6 and 2.2 eV persisting at room temperature.

    Original languageEnglish
    Pages (from-to)199-201
    Number of pages3
    JournalConference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD
    Publication statusPublished - 1999

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