Laser based fabrication of micro and nano-structures using sacrificial layers

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

Abstract

When using ultra-short laser pulses it is possible to machine areas smaller than the focal spot by restricting the threshold light intensity to the centre of the spot. However, even smaller and cleaner features can be achieved by utilising a sacrificial material on top of the layer being machined. In particular, we have found that features can be reduced by up to a factor of two and the heat-affected-zone by a factor of three in polymers. These results have implications for improved fabrication of fluid and gas delivery systems and optical devices such as photonic crystals and related devices.
Original languageEnglish
Title of host publicationProceedings of the 23rd international congress on applications of lasers and electro-optics 2004
EditorsRajesh Patel
Place of PublicationOrlando, FL
PublisherLaser Institute of America
Pages31-34
Number of pages4
ISBN (Print)0912035773, 9780912035772
DOIs
Publication statusPublished - 2004
EventICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics - San Francisco, CA, United States
Duration: 4 Oct 20047 Oct 2004

Other

OtherICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics
CountryUnited States
CitySan Francisco, CA
Period4/10/047/10/04

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