A study on surface cleaning using a KrF excimer laser with a comparatively large laser beam was reported. Three different pulsed lasers and different particle deposition techniques were contrasted for removing alumina particles from glass surfaces. The results showed a significant spatial variation in the cleaning efficiency achieved within different regions of the beam.
|Number of pages||6|
|Journal||Proceedings of SPIE - The International Society for Optical Engineering|
|Publication status||Published - 2002|
- Laser cleaning
- Particle removal from surfaces
- Wavelength dependence