Laser cleaning of particles from surfaces - Issues relating to sample preparation

Deb Kane*, Alanna Fernandes

*Corresponding author for this work

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

A study on surface cleaning using a KrF excimer laser with a comparatively large laser beam was reported. Three different pulsed lasers and different particle deposition techniques were contrasted for removing alumina particles from glass surfaces. The results showed a significant spatial variation in the cleaning efficiency achieved within different regions of the beam.

Original languageEnglish
Pages (from-to)334-339
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4426
DOIs
Publication statusPublished - 2002

Keywords

  • Laser cleaning
  • Particle removal from surfaces
  • Wavelength dependence

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