Laser cleaning of particles from surfaces - Issues relating to sample preparation

Deb Kane; Alanna Fernandes

doi:10.1117/12.456826

Laser cleaning of particles from surfaces - Issues relating to sample preparation

Deb Kane^*, Alanna Fernandes

^*Corresponding author for this work

Faculty of Science and Engineering

Research output: Contribution to journal › Article

11 Citations (Scopus)

Abstract

A study on surface cleaning using a KrF excimer laser with a comparatively large laser beam was reported. Three different pulsed lasers and different particle deposition techniques were contrasted for removing alumina particles from glass surfaces. The results showed a significant spatial variation in the cleaning efficiency achieved within different regions of the beam.

Original language	English
Pages (from-to)	334-339
Number of pages	6
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4426
DOIs	https://doi.org/10.1117/12.456826
Publication status	Published - 2002

Keywords

Laser cleaning
Particle removal from surfaces
Wavelength dependence

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title = "Laser cleaning of particles from surfaces - Issues relating to sample preparation",

abstract = "A study on surface cleaning using a KrF excimer laser with a comparatively large laser beam was reported. Three different pulsed lasers and different particle deposition techniques were contrasted for removing alumina particles from glass surfaces. The results showed a significant spatial variation in the cleaning efficiency achieved within different regions of the beam.",

keywords = "Laser cleaning, Particle removal from surfaces, Wavelength dependence",

author = "Deb Kane and Alanna Fernandes",

year = "2002",

doi = "10.1117/12.456826",

language = "English",

volume = "4426",

pages = "334--339",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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T1 - Laser cleaning of particles from surfaces - Issues relating to sample preparation

AU - Kane, Deb

AU - Fernandes, Alanna

PY - 2002

Y1 - 2002

N2 - A study on surface cleaning using a KrF excimer laser with a comparatively large laser beam was reported. Three different pulsed lasers and different particle deposition techniques were contrasted for removing alumina particles from glass surfaces. The results showed a significant spatial variation in the cleaning efficiency achieved within different regions of the beam.

AB - A study on surface cleaning using a KrF excimer laser with a comparatively large laser beam was reported. Three different pulsed lasers and different particle deposition techniques were contrasted for removing alumina particles from glass surfaces. The results showed a significant spatial variation in the cleaning efficiency achieved within different regions of the beam.

KW - Laser cleaning

KW - Particle removal from surfaces

KW - Wavelength dependence

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U2 - 10.1117/12.456826

DO - 10.1117/12.456826

M3 - Article

AN - SCOPUS:0036387649

SN - 0277-786X

VL - 4426

SP - 334

EP - 339

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Laser cleaning of particles from surfaces - Issues relating to sample preparation

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Keywords

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