Localized thinning for strain concentration in suspended germanium membranes and optical method for precise thickness measurement
P. O. Vaccaro, M. I. Alonso, M. Garriga, J. Gutiérrez, D. Peró, M. R. Wagner, J. S. Reparaz, C. M. Sotomayor Torres, X. Vidal, E. A. Carter, P. A. Lay, M. Yoshimoto, A. R. Goñi
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