Low-temperature epitaxial growth of Ge on Si, towards a cost-effective substrate for III-V solar cells

Ziheng Liu, Xiaojing Hao, Anita Ho-Baillie, Martin A. Green

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionpeer-review

Abstract

Epitaxial Ge on Si could be used as a virtual Ge substrate for III-V solar cells which has superior mechanical properties and is less expensive than Ge wafers. Aluminiumassisted crystallization via magnetron sputtering offers a low-cost method allows the epitaxy of Ge on Si at low temperatures. The novelty of our one-step aluminium-assisted crystallization of Ge epitaxy on Si lies in the elimination of the post-deposition annealing step. Our process simply requires sequential depositions of Al and Ge films via magnetron sputtering in the same chamber without breaking the vacuum. By applying an insitu low-temperature (100°C) heat treatment in between Al and Ge depositions, Ge epitaxy on Si is achieved.

Original languageEnglish
Title of host publication2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC) (A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages216-219
Number of pages4
VolumePiscataway, NJ
ISBN (Electronic)9781538685297
ISBN (Print)9781538685303
DOIs
Publication statusPublished - 2018
Externally publishedYes
Event7th IEEE World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - Waikoloa Village, United States
Duration: 10 Jun 201815 Jun 2018

Publication series

Name
ISSN (Print)0160-8371

Conference

Conference7th IEEE World Conference on Photovoltaic Energy Conversion, WCPEC 2018
Country/TerritoryUnited States
CityWaikoloa Village
Period10/06/1815/06/18

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