Abstract
The proximity effect in successively developed direct-write electron-beam lithography gratings is measured. The grating relief shapes are obtained from the measured power in several of the gratings' diffraction orders. Describing the proximity effect by a convolution with a double Gaussian point-spread function, we determine the parameters of the point-spread function. The writing part of the point-spread function is found to increase significantly with increasing development time, the background part much less.
Original language | English |
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Pages (from-to) | 897-903 |
Number of pages | 7 |
Journal | Doktorsavhandlingar vid Chalmers Tekniska Hogskola |
Issue number | 1263 |
Publication status | Published - Aug 1997 |