MEMS artificial canal neuromast sensor arrays for underwater sensing

Ajay Giri Prakash Kottapalli, Mohsen Asadnia, Jianmin Miao, Michael S. Triantafyllou

Research output: Contribution to journalConference paperpeer-review

Abstract

The paper reports the development of biomimetic haircell sensors inspired by the neuromast sensors present in fish. Two different types of sensors are fabricated - the superficial haircell sensors which perform flow velocity sensing and the canal encapsulated haircell sensors which perform flow acceleration sensing. Flexible arrays of polymer MEMS haircell sensors are fabricated and encapsulated in polydimethylsiloxane (PDMS) canal structures. The superficial haircell sensors are calibrated in water tunnel for flow velocity sensing and the steady-state flow filtering ability of the canal encapsulated haircell sensors is experimentally investigated.

Original languageEnglish
Article number6985031
Pages (from-to)448-451
Number of pages4
JournalProceedings of IEEE Sensors
Volume2014-December
Issue numberDecember
DOIs
Publication statusPublished - 12 Dec 2014
Externally publishedYes
EventSENSORS, 2014 IEEE - Valencia, Spain, Valencia
Duration: 2 Nov 20145 Nov 2014

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