The paper reports the development of biomimetic haircell sensors inspired by the neuromast sensors present in fish. Two different types of sensors are fabricated - the superficial haircell sensors which perform flow velocity sensing and the canal encapsulated haircell sensors which perform flow acceleration sensing. Flexible arrays of polymer MEMS haircell sensors are fabricated and encapsulated in polydimethylsiloxane (PDMS) canal structures. The superficial haircell sensors are calibrated in water tunnel for flow velocity sensing and the steady-state flow filtering ability of the canal encapsulated haircell sensors is experimentally investigated.
|Number of pages||4|
|Journal||Proceedings of IEEE Sensors|
|Publication status||Published - 12 Dec 2014|
|Event||SENSORS, 2014 IEEE - Valencia, Spain, Valencia|
Duration: 2 Nov 2014 → 5 Nov 2014