MEMS-based VCSEL beam steering using replicated polymer diffractive lens

Karin Hedsten*, Jonas Melin, Jörgen Bengtsson, Peter Modh, David Karlén, Björn Löfving, Richard Nilsson, Henrik Rödjegård, Katrin Persson, Peter Enoksson, Fredrik Nikolajeff, Gert Andersson

*Corresponding author for this work

Research output: Contribution to journalArticle

25 Citations (Scopus)


This paper describes a fully integrated micro-optical system, in which dynamic angular control of the beam from a vertical cavity surface emitting laser (VCSEL) is realized by laterally moving a collimating diffractive lens in the light path. The lens is mounted on a translatable silicon stage, which consists of a frame with an opening for the light to traverse the lens and electro-statically driven comb actuators, by which the lateral movement is achieved. Devices implementing both one- (1D) and two-dimensional (2D) scanning have been fabricated and evaluated. Integration of the lens onto the translatable silicon stage is done using a newly developed fabrication process based on hot embossing of an amorphous fluorocarbon polymer. This fabrication process relies on a reversed-order protocol, where the structuring of the optical element precedes the silicon microstructuring. Assembly and packaging of the VCSEL-MOEMS system, using low temperature cofired ceramic (LTCC) technique, is also demonstrated. Optical evaluation of the system and beam steering function shows significant beam deflection for a relatively low driving voltage (∼70 V).

Original languageEnglish
Pages (from-to)336-345
Number of pages10
JournalSensors and Actuators, A: Physical
Issue number1
Publication statusPublished - 10 Mar 2008


  • Beam steering
  • Diffractive micro-optics
  • Microsystem
  • Replication

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