TY - JOUR
T1 - MEMS piezoresistive flow sensors for sleep apnea therapy
AU - Abbasnejad, Behrokh
AU - Thorby, William
AU - Razmjou, Amir
AU - Jin, Dayong
AU - Asadnia, Mohsen
AU - Ebrahimi Warkiani, Majid
PY - 2018/8/15
Y1 - 2018/8/15
N2 - A MEMS liquid crystal polymer (LCP), used in the membrane-based pressure sensor, has been found highly useful as a flow sensor. Here we conducted a set of elaborate experiments using an air flow generator to investigate the potential of our LCP flow sensor for sleep apnea therapy. Critical properties of the LCP flow sensor, including flow range, resolution (sensitivity), accuracy, and response time, have been systematically characterized. As a result, LCP flow sensor achieves a limit of detection of 8 LPM to measure flow rate, better than the commercial flow sensor (>10 LPM). Our LCP flow sensor shows a favourable response in a large flow range (8–160 LPM) with a sensitivity of detecting a linear voltage response of 0.004 V per 1 LPM flow rate. With minimum detectable flow, high sensitivity and resolution, we further demonstrated our LCP flow sensor for detecting human respiration. Moreover, using a two- dimensional simulation in COMSOL Multiphysics, we demonstrated the deformation of LCP membrane in response to different flow velocities which leads to resistance change in sensor's strain gauge.
AB - A MEMS liquid crystal polymer (LCP), used in the membrane-based pressure sensor, has been found highly useful as a flow sensor. Here we conducted a set of elaborate experiments using an air flow generator to investigate the potential of our LCP flow sensor for sleep apnea therapy. Critical properties of the LCP flow sensor, including flow range, resolution (sensitivity), accuracy, and response time, have been systematically characterized. As a result, LCP flow sensor achieves a limit of detection of 8 LPM to measure flow rate, better than the commercial flow sensor (>10 LPM). Our LCP flow sensor shows a favourable response in a large flow range (8–160 LPM) with a sensitivity of detecting a linear voltage response of 0.004 V per 1 LPM flow rate. With minimum detectable flow, high sensitivity and resolution, we further demonstrated our LCP flow sensor for detecting human respiration. Moreover, using a two- dimensional simulation in COMSOL Multiphysics, we demonstrated the deformation of LCP membrane in response to different flow velocities which leads to resistance change in sensor's strain gauge.
KW - Breath analyzer
KW - MEMS flow sensor
KW - Liquid crystal polymer
UR - http://www.scopus.com/inward/record.url?scp=85049471111&partnerID=8YFLogxK
UR - http://purl.org/au-research/grants/arc/DE180100688
U2 - 10.1016/j.sna.2018.06.038
DO - 10.1016/j.sna.2018.06.038
M3 - Article
AN - SCOPUS:85049471111
SN - 0924-4247
VL - 279
SP - 577
EP - 585
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
ER -