Metrology of holes in gold nano-film using interferometric microscopy

Douglas J. Little; Deb M. Kane

doi:10.1109/COMMAD.2014.7038710

Metrology of holes in gold nano-film using interferometric microscopy

Douglas J. Little, Deb M. Kane

MQ Photonics Research Centre

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

We present an optical metrology technique based on phase-shifting interferometric (PSI) microscopy applied to circular holes in a gold nano-film. We demonstrate that the optical phase measured at the image plane can be accurately calculated, even in the presence of diffraction. For holes with a radius less than 200 nm, the optical phase exhibited a strong dependence on hole size, highlighting the metrological potential of this technique. Measurement of the coherent impulse response of the interferometric microscope, and refractive index measurements of nanoparticles and nano structure s are also discussed as potential applications.

Original language	English
Title of host publication	COMMAD 2014 Conference Proceedings
Subtitle of host publication	Conference on Optoelectronic and Microelectronic Materials and Devices
Editors	Lorenzo Faraone, Mariusz Martyniuk
Place of Publication	Piscataway, NJ
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	275-278
Number of pages	4
ISBN (Electronic)	9781479968688
ISBN (Print)	9781479968671
DOIs	https://doi.org/10.1109/COMMAD.2014.7038710
Publication status	Published - 10 Feb 2014
Event	2014 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2014 - Perth, Australia Duration: 14 Dec 2014 → 17 Dec 2014

Other

Other	2014 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2014
Country/Territory	Australia
City	Perth
Period	14/12/14 → 17/12/14

Access to Document

10.1109/COMMAD.2014.7038710

Cite this

@inproceedings{a9f839f9cc3745a1b501609805a3918d,

title = "Metrology of holes in gold nano-film using interferometric microscopy",

abstract = "We present an optical metrology technique based on phase-shifting interferometric (PSI) microscopy applied to circular holes in a gold nano-film. We demonstrate that the optical phase measured at the image plane can be accurately calculated, even in the presence of diffraction. For holes with a radius less than 200 nm, the optical phase exhibited a strong dependence on hole size, highlighting the metrological potential of this technique. Measurement of the coherent impulse response of the interferometric microscope, and refractive index measurements of nanoparticles and nano structure s are also discussed as potential applications.",

author = "Little, {Douglas J.} and Kane, {Deb M.}",

year = "2014",

month = feb,

day = "10",

doi = "10.1109/COMMAD.2014.7038710",

language = "English",

isbn = "9781479968671",

pages = "275--278",

editor = "Lorenzo Faraone and Mariusz Martyniuk",

booktitle = "COMMAD 2014 Conference Proceedings",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

address = "United States",

note = "2014 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2014 ; Conference date: 14-12-2014 Through 17-12-2014",

}

Little, DJ & Kane, DM 2014, Metrology of holes in gold nano-film using interferometric microscopy. in L Faraone & M Martyniuk (eds), COMMAD 2014 Conference Proceedings: Conference on Optoelectronic and Microelectronic Materials and Devices. Institute of Electrical and Electronics Engineers (IEEE), Piscataway, NJ, pp. 275-278, 2014 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2014, Perth, Australia, 14/12/14. https://doi.org/10.1109/COMMAD.2014.7038710

Metrology of holes in gold nano-film using interferometric microscopy. / Little, Douglas J.; Kane, Deb M.

COMMAD 2014 Conference Proceedings: Conference on Optoelectronic and Microelectronic Materials and Devices. ed. / Lorenzo Faraone; Mariusz Martyniuk. Piscataway, NJ : Institute of Electrical and Electronics Engineers (IEEE), 2014. p. 275-278.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

TY - GEN

T1 - Metrology of holes in gold nano-film using interferometric microscopy

AU - Little, Douglas J.

AU - Kane, Deb M.

PY - 2014/2/10

Y1 - 2014/2/10

N2 - We present an optical metrology technique based on phase-shifting interferometric (PSI) microscopy applied to circular holes in a gold nano-film. We demonstrate that the optical phase measured at the image plane can be accurately calculated, even in the presence of diffraction. For holes with a radius less than 200 nm, the optical phase exhibited a strong dependence on hole size, highlighting the metrological potential of this technique. Measurement of the coherent impulse response of the interferometric microscope, and refractive index measurements of nanoparticles and nano structure s are also discussed as potential applications.

AB - We present an optical metrology technique based on phase-shifting interferometric (PSI) microscopy applied to circular holes in a gold nano-film. We demonstrate that the optical phase measured at the image plane can be accurately calculated, even in the presence of diffraction. For holes with a radius less than 200 nm, the optical phase exhibited a strong dependence on hole size, highlighting the metrological potential of this technique. Measurement of the coherent impulse response of the interferometric microscope, and refractive index measurements of nanoparticles and nano structure s are also discussed as potential applications.

UR - http://www.scopus.com/inward/record.url?scp=84949929400&partnerID=8YFLogxK

U2 - 10.1109/COMMAD.2014.7038710

DO - 10.1109/COMMAD.2014.7038710

M3 - Conference proceeding contribution

AN - SCOPUS:84949929400

SN - 9781479968671

SP - 275

EP - 278

BT - COMMAD 2014 Conference Proceedings

A2 - Faraone, Lorenzo

A2 - Martyniuk, Mariusz

PB - Institute of Electrical and Electronics Engineers (IEEE)

CY - Piscataway, NJ

T2 - 2014 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2014

Y2 - 14 December 2014 through 17 December 2014

ER -

Metrology of holes in gold nano-film using interferometric microscopy

Abstract

Other

Access to Document

Other files and links

Fingerprint

Optical Profiler with D-MEMS Capability

Cite this

Metrology of holes in gold nano-film using interferometric microscopy

Abstract

Other

Access to Document

Other files and links

Fingerprint

Projects

Optical Profiler with D-MEMS Capability

Cite this