Metrology of holes in gold nano-film using interferometric microscopy

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

Abstract

We present an optical metrology technique based on phase-shifting interferometric (PSI) microscopy applied to circular holes in a gold nano-film. We demonstrate that the optical phase measured at the image plane can be accurately calculated, even in the presence of diffraction. For holes with a radius less than 200 nm, the optical phase exhibited a strong dependence on hole size, highlighting the metrological potential of this technique. Measurement of the coherent impulse response of the interferometric microscope, and refractive index measurements of nanoparticles and nano structure s are also discussed as potential applications.

Original languageEnglish
Title of host publication2014 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2014
Place of PublicationPiscataway, NJ
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages275-278
Number of pages4
ISBN (Electronic)9781479968671
DOIs
Publication statusPublished - 10 Feb 2014
Event2014 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2014 - Perth, Australia
Duration: 14 Dec 201417 Dec 2014

Other

Other2014 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2014
CountryAustralia
CityPerth
Period14/12/1417/12/14

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