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We present an optical metrology technique based on phase-shifting interferometric (PSI) microscopy applied to circular holes in a gold nano-film. We demonstrate that the optical phase measured at the image plane can be accurately calculated, even in the presence of diffraction. For holes with a radius less than 200 nm, the optical phase exhibited a strong dependence on hole size, highlighting the metrological potential of this technique. Measurement of the coherent impulse response of the interferometric microscope, and refractive index measurements of nanoparticles and nano structure s are also discussed as potential applications.
|Title of host publication||COMMAD 2014 Conference Proceedings|
|Subtitle of host publication||Conference on Optoelectronic and Microelectronic Materials and Devices|
|Editors||Lorenzo Faraone, Mariusz Martyniuk|
|Place of Publication||Piscataway, NJ|
|Publisher||Institute of Electrical and Electronics Engineers (IEEE)|
|Number of pages||4|
|Publication status||Published - 10 Feb 2014|
|Event||2014 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2014 - Perth, Australia|
Duration: 14 Dec 2014 → 17 Dec 2014
|Other||2014 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2014|
|Period||14/12/14 → 17/12/14|
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- 1 Finished
Optical Profiler with D-MEMS Capability
Kane, D., Withford, M., Dawes, J., Carman, R., Herberstein, M., Tan, H., Fu, L., Faraone, L., Antoszewski, J., Keating, A. & Chinchen, G.
1/03/11 → 31/12/12