Micro sized interdigital capacitor for gases detection based on graphene oxide coating

Ignacio Vitoria; Dayron Armas; Carlos Coronel; Manuel Algarra; Carlos Ruiz Zamarreño; Ignacio R. Matias; Subhas C. Mukhopadhyay

doi:10.1007/978-3-031-29871-4_4

Micro sized interdigital capacitor for gases detection based on graphene oxide coating

Ignacio Vitoria^*, Dayron Armas, Carlos Coronel, Manuel Algarra, Carlos Ruiz Zamarreño, Ignacio R. Matias, Subhas C. Mukhopadhyay

^*Corresponding author for this work

School of Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

A micro sized interdigital capacitor sensible to CO₂ and NO is studied in this work. The photolithography technique enables to obtain fingers with dimensions of 10 × 500 µm and separated 7 µm between them. The deposition of a film composed of graphene oxide particles as the dielectrics of the capacitor allows to measure the gas concentration of CO₂ and NO mixed with N₂. The sensors were characterized in a gas chamber with a constant flow, obtaining promising results in changes of capacitance at 100 Hz. The sensors have a good linearity and sensitivity with a R² = 0.996 and 5.026·10^–1 pF/% v/v for CO₂ and R² = 0.972 and 1.433·10^–1 pF/ppb for NO.

Original language	English
Title of host publication	Sensing technology
Subtitle of host publication	proceedings of ICST'15
Editors	Nagender Kumar Suryadevara, Boby George, Krishanthi P. Jayasundera, Subhas Chandra Mukhopadhyay
Place of Publication	Cham
Publisher	Springer, Springer Nature
Pages	24-30
Number of pages	7
ISBN (Electronic)	9783031298714
ISBN (Print)	9783031298707, 9783031298738
DOIs	https://doi.org/10.1007/978-3-031-29871-4_4
Publication status	Published - 2023
Event	15th International Conference on Sensing Technology, ICST 2022 - Sydney, Australia Duration: 5 Dec 2022 → 7 Dec 2022

Publication series

Name	Lecture Notes in Electrical Engineering
Publisher	Springer
Volume	1035
ISSN (Print)	1876-1100
ISSN (Electronic)	1876-1119

Conference

Conference	15th International Conference on Sensing Technology, ICST 2022
Country/Territory	Australia
City	Sydney
Period	5/12/22 → 7/12/22

Keywords

Interdigital
Gas Sensor
Graphene Oxide
Photolithography

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10.1007/978-3-031-29871-4_4

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Vitoria, I., Armas, D., Coronel, C., Algarra, M., Zamarreño, C. R., Matias, I. R., & Mukhopadhyay, S. C. (2023). Micro sized interdigital capacitor for gases detection based on graphene oxide coating. In N. K. Suryadevara, B. George, K. P. Jayasundera, & S. C. Mukhopadhyay (Eds.), Sensing technology: proceedings of ICST'15 (pp. 24-30). (Lecture Notes in Electrical Engineering; Vol. 1035). Springer, Springer Nature. https://doi.org/10.1007/978-3-031-29871-4_4

Vitoria, Ignacio ; Armas, Dayron ; Coronel, Carlos et al. / Micro sized interdigital capacitor for gases detection based on graphene oxide coating. Sensing technology: proceedings of ICST'15. editor / Nagender Kumar Suryadevara ; Boby George ; Krishanthi P. Jayasundera ; Subhas Chandra Mukhopadhyay. Cham : Springer, Springer Nature, 2023. pp. 24-30 (Lecture Notes in Electrical Engineering).

@inproceedings{f0993eb38efa4a84a3017bdaf0e71972,

title = "Micro sized interdigital capacitor for gases detection based on graphene oxide coating",

abstract = "A micro sized interdigital capacitor sensible to CO2 and NO is studied in this work. The photolithography technique enables to obtain fingers with dimensions of 10 × 500 µm and separated 7 µm between them. The deposition of a film composed of graphene oxide particles as the dielectrics of the capacitor allows to measure the gas concentration of CO2 and NO mixed with N2. The sensors were characterized in a gas chamber with a constant flow, obtaining promising results in changes of capacitance at 100 Hz. The sensors have a good linearity and sensitivity with a R2 = 0.996 and 5.026·10–1 pF/% v/v for CO2 and R2 = 0.972 and 1.433·10–1 pF/ppb for NO.",

keywords = "Interdigital, Gas Sensor, Graphene Oxide, Photolithography",

author = "Ignacio Vitoria and Dayron Armas and Carlos Coronel and Manuel Algarra and Zamarre{\~n}o, {Carlos Ruiz} and Matias, {Ignacio R.} and Mukhopadhyay, {Subhas C.}",

year = "2023",

doi = "10.1007/978-3-031-29871-4_4",

language = "English",

isbn = "9783031298707",

series = "Lecture Notes in Electrical Engineering",

publisher = "Springer, Springer Nature",

pages = "24--30",

editor = "Suryadevara, {Nagender Kumar} and Boby George and Jayasundera, {Krishanthi P.} and Mukhopadhyay, {Subhas Chandra}",

booktitle = "Sensing technology",

address = "United States",

note = "15th International Conference on Sensing Technology, ICST 2022 ; Conference date: 05-12-2022 Through 07-12-2022",

}

Vitoria, I, Armas, D, Coronel, C, Algarra, M, Zamarreño, CR, Matias, IR & Mukhopadhyay, SC 2023, Micro sized interdigital capacitor for gases detection based on graphene oxide coating. in NK Suryadevara, B George, KP Jayasundera & SC Mukhopadhyay (eds), Sensing technology: proceedings of ICST'15. Lecture Notes in Electrical Engineering, vol. 1035, Springer, Springer Nature, Cham, pp. 24-30, 15th International Conference on Sensing Technology, ICST 2022, Sydney, Australia, 5/12/22. https://doi.org/10.1007/978-3-031-29871-4_4

Micro sized interdigital capacitor for gases detection based on graphene oxide coating. / Vitoria, Ignacio; Armas, Dayron; Coronel, Carlos et al.
Sensing technology: proceedings of ICST'15. ed. / Nagender Kumar Suryadevara; Boby George; Krishanthi P. Jayasundera; Subhas Chandra Mukhopadhyay. Cham: Springer, Springer Nature, 2023. p. 24-30 (Lecture Notes in Electrical Engineering; Vol. 1035).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

TY - GEN

T1 - Micro sized interdigital capacitor for gases detection based on graphene oxide coating

AU - Vitoria, Ignacio

AU - Armas, Dayron

AU - Coronel, Carlos

AU - Algarra, Manuel

AU - Zamarreño, Carlos Ruiz

AU - Matias, Ignacio R.

AU - Mukhopadhyay, Subhas C.

PY - 2023

Y1 - 2023

N2 - A micro sized interdigital capacitor sensible to CO2 and NO is studied in this work. The photolithography technique enables to obtain fingers with dimensions of 10 × 500 µm and separated 7 µm between them. The deposition of a film composed of graphene oxide particles as the dielectrics of the capacitor allows to measure the gas concentration of CO2 and NO mixed with N2. The sensors were characterized in a gas chamber with a constant flow, obtaining promising results in changes of capacitance at 100 Hz. The sensors have a good linearity and sensitivity with a R2 = 0.996 and 5.026·10–1 pF/% v/v for CO2 and R2 = 0.972 and 1.433·10–1 pF/ppb for NO.

AB - A micro sized interdigital capacitor sensible to CO2 and NO is studied in this work. The photolithography technique enables to obtain fingers with dimensions of 10 × 500 µm and separated 7 µm between them. The deposition of a film composed of graphene oxide particles as the dielectrics of the capacitor allows to measure the gas concentration of CO2 and NO mixed with N2. The sensors were characterized in a gas chamber with a constant flow, obtaining promising results in changes of capacitance at 100 Hz. The sensors have a good linearity and sensitivity with a R2 = 0.996 and 5.026·10–1 pF/% v/v for CO2 and R2 = 0.972 and 1.433·10–1 pF/ppb for NO.

KW - Interdigital

KW - Gas Sensor

KW - Graphene Oxide

KW - Photolithography

UR - http://www.scopus.com/inward/record.url?scp=85159454596&partnerID=8YFLogxK

U2 - 10.1007/978-3-031-29871-4_4

DO - 10.1007/978-3-031-29871-4_4

M3 - Conference proceeding contribution

AN - SCOPUS:85159454596

SN - 9783031298707

SN - 9783031298738

T3 - Lecture Notes in Electrical Engineering

SP - 24

EP - 30

BT - Sensing technology

A2 - Suryadevara, Nagender Kumar

A2 - George, Boby

A2 - Jayasundera, Krishanthi P.

A2 - Mukhopadhyay, Subhas Chandra

PB - Springer, Springer Nature

CY - Cham

T2 - 15th International Conference on Sensing Technology, ICST 2022

Y2 - 5 December 2022 through 7 December 2022

ER -

Vitoria I, Armas D, Coronel C, Algarra M, Zamarreño CR, Matias IR et al. Micro sized interdigital capacitor for gases detection based on graphene oxide coating. In Suryadevara NK, George B, Jayasundera KP, Mukhopadhyay SC, editors, Sensing technology: proceedings of ICST'15. Cham: Springer, Springer Nature. 2023. p. 24-30. (Lecture Notes in Electrical Engineering). doi: 10.1007/978-3-031-29871-4_4

Micro sized interdigital capacitor for gases detection based on graphene oxide coating

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