Microreplication in a silicon processing compatible polymer material

Jonas Melin*, Karin Hedsten, Anders Magnusson, David Karlén, Henrik Rödjegård, Katrin Persson, Jörgen Bengtsson, Peter Enoksson, Fredrik Nikolajeff

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionpeer-review

Abstract

We present a novel fabrication process for the integration of polymer micro-optical elements on silicon. The process relies on a reverse order protocol based on embossing in an amorphous fluorocarbon polymer, Cytop™.

Original languageEnglish
Title of host publicationIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
Pages89-90
Number of pages2
DOIs
Publication statusPublished - 2005
EventIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications - Oulu, Finland
Duration: 1 Aug 20054 Aug 2005

Other

OtherIEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
CountryFinland
CityOulu
Period1/08/054/08/05

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