Microreplication in a silicon processing compatible polymer material

Jonas Melin; Karin Hedsten; Anders Magnusson; David Karlén; Henrik Rödjegård; Katrin Persson; Jörgen Bengtsson; Peter Enoksson; Fredrik Nikolajeff

doi:10.1109/OMEMS.2005.1540091

Microreplication in a silicon processing compatible polymer material

Jonas Melin^*, Karin Hedsten, Anders Magnusson, David Karlén, Henrik Rödjegård, Katrin Persson, Jörgen Bengtsson, Peter Enoksson, Fredrik Nikolajeff

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

We present a novel fabrication process for the integration of polymer micro-optical elements on silicon. The process relies on a reverse order protocol based on embossing in an amorphous fluorocarbon polymer, Cytop™.

Original language	English
Title of host publication	IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
Pages	89-90
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2005.1540091
Publication status	Published - 2005
Event	IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications - Oulu, Finland Duration: 1 Aug 2005 → 4 Aug 2005

Other

Other	IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
Country/Territory	Finland
City	Oulu
Period	1/08/05 → 4/08/05

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10.1109/OMEMS.2005.1540091

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Melin, J., Hedsten, K., Magnusson, A., Karlén, D., Rödjegård, H., Persson, K., Bengtsson, J., Enoksson, P., & Nikolajeff, F. (2005). Microreplication in a silicon processing compatible polymer material. In IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications (pp. 89-90). Article 1540091 https://doi.org/10.1109/OMEMS.2005.1540091

@inproceedings{568bee4237824240a14748d1c1516758,

title = "Microreplication in a silicon processing compatible polymer material",

abstract = "We present a novel fabrication process for the integration of polymer micro-optical elements on silicon. The process relies on a reverse order protocol based on embossing in an amorphous fluorocarbon polymer, Cytop{\texttrademark}.",

author = "Jonas Melin and Karin Hedsten and Anders Magnusson and David Karl{\'e}n and Henrik R{\"o}djeg{\aa}rd and Katrin Persson and J{\"o}rgen Bengtsson and Peter Enoksson and Fredrik Nikolajeff",

year = "2005",

doi = "10.1109/OMEMS.2005.1540091",

language = "English",

isbn = "0780392787",

pages = "89--90",

booktitle = "IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications",

note = "IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications ; Conference date: 01-08-2005 Through 04-08-2005",

}

Melin, J, Hedsten, K, Magnusson, A, Karlén, D, Rödjegård, H, Persson, K, Bengtsson, J, Enoksson, P & Nikolajeff, F 2005, Microreplication in a silicon processing compatible polymer material. in IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications., 1540091, pp. 89-90, IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications, Oulu, Finland, 1/08/05. https://doi.org/10.1109/OMEMS.2005.1540091

TY - GEN

T1 - Microreplication in a silicon processing compatible polymer material

AU - Melin, Jonas

AU - Hedsten, Karin

AU - Magnusson, Anders

AU - Karlén, David

AU - Rödjegård, Henrik

AU - Persson, Katrin

AU - Bengtsson, Jörgen

AU - Enoksson, Peter

AU - Nikolajeff, Fredrik

PY - 2005

Y1 - 2005

N2 - We present a novel fabrication process for the integration of polymer micro-optical elements on silicon. The process relies on a reverse order protocol based on embossing in an amorphous fluorocarbon polymer, Cytop™.

AB - We present a novel fabrication process for the integration of polymer micro-optical elements on silicon. The process relies on a reverse order protocol based on embossing in an amorphous fluorocarbon polymer, Cytop™.

UR - http://www.scopus.com/inward/record.url?scp=33749063853&partnerID=8YFLogxK

U2 - 10.1109/OMEMS.2005.1540091

DO - 10.1109/OMEMS.2005.1540091

M3 - Conference proceeding contribution

AN - SCOPUS:33749063853

SN - 0780392787

SN - 9780780392786

SP - 89

EP - 90

BT - IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

T2 - IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Y2 - 1 August 2005 through 4 August 2005

ER -

Microreplication in a silicon processing compatible polymer material

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