Microreplication in a silicon processing compatible polymer material

Jonas Melin*, Karin Hedsten, Anders Magnusson, David Karlén, Henrik Rödjegård, Katrin Persson, Jörgen Bengtsson, Peter Enoksson, Fredrik Nikolajeff

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionpeer-review

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Engineering & Materials Science