Modeling and experimental analysis of RPCVD based nitride film growth

C. Martin*, K. S A Butcher, M. Wintrebert-Fouquet, A. Fernandes, T. Dabbs, P. P T Chen, R. Carmen

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionpeer-review

9 Citations (Scopus)

Fingerprint Dive into the research topics of 'Modeling and experimental analysis of RPCVD based nitride film growth'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy