Modeling low pressure collisional plasma sheath with space-charge effect

Subrata Roy*, B. P. Pandey, Jonathan Poggie, Datta V. Gaitonde

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

42 Citations (Scopus)

Abstract

The development of a computationally efficient one-dimensional subgrid embedded finite element formulation for plasma-sheath dynamics was presented. By using the multifluid equations, the model incorporated space-charge effect throughout the whole plasma and sheath region. It was found that the computed sheath potential compared well with the experimental data.

Original languageEnglish
Pages (from-to)2578-2585
Number of pages8
JournalPhysics of Plasmas
Volume10
Issue number6
DOIs
Publication statusPublished - Jun 2003
Externally publishedYes

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