Abstract
In this letter, a macromodel for normally-off (enhancement mode) AlGaN/GaN-based FinFET (2-DEG channel at top with two MOS like sidewall channels) is proposed. AlGaN/GaN-based FinFET devices have improved gate control on the channel due to additional sidewall gates compared with planar structures, but device characteristics exhibit strong nonlinear dependence on fin-width. The proposed model captures both 2-DEG and sidewall channel conduction as well as the fin-width dependency on device characteristics. Model shows excellent agreement with state-of-the-art experimental data.
| Original language | English |
|---|---|
| Article number | 6786354 |
| Pages (from-to) | 612-614 |
| Number of pages | 3 |
| Journal | IEEE Electron Device Letters |
| Volume | 35 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - Jun 2014 |
| Externally published | Yes |
Keywords
- 2-DEG
- AlGaN/GaN
- compact model
- III-V FinFET
- tri-gate