Abstract
We present a phenomenological model for subsurface leakage current in MOSFETs biased in accumulation. The subsurface leakage current is mainly caused by source-drain coupling, leading to carriers surmounting the barrier between the source and the drain. The developed model successfully takes drain-to-source voltage (VDS), gate-to-source voltage ( VGS), gate length ( LG), substrate doping concentration ( Nsub), and temperature ( $T$ ) dependence into account. The presented analytical model is implemented into the BSIM6 bulk MOSFET model and is in good agreement with technology-CAD simulation data.
| Original language | English |
|---|---|
| Article number | 7448409 |
| Pages (from-to) | 1840-1845 |
| Number of pages | 6 |
| Journal | IEEE Transactions on Electron Devices |
| Volume | 63 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 1 May 2016 |
| Externally published | Yes |
Keywords
- BSIM6
- leakage
- modeling
- short channel
- subsurface
- zero-V MOSFET
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