Monolithic integration of continuous-relief diffractive structures with vertical-cavity surface-emitting lasers

M. Karlsson*, F. Nikolajeff, J. Vukusic, H. Martinsson, J. Bengtsson, A. Larsson

*Corresponding author for this work

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

In this work, we have studied the transfer of diffractive optical elements (DOEs), originally made in resist, into GaAs for monolithic integration with vertical-cavity surface-emitting lasers (VCSELs). The DOEs are blazed gratings and Fresnel lenses, and have been fabricated on the back surface of bottom emitting VCSELs using electron-beam lithography or replication by hot embossing in resist followed by a quick-dry etch step. Diffraction efficiency was measured to be 81% in the first order of diffraction for the blazed grating.

Original languageEnglish
Pages (from-to)359-361
Number of pages3
JournalIEEE Photonics Technology Letters
Volume15
Issue number3
DOIs
Publication statusPublished - Mar 2003

Keywords

  • Bottom-emitting vertical-cavity surface-emitting laser (VCSEL)
  • Diffractive optical elements (DOEs)
  • Electron beam lithography
  • Gratings
  • Laser beam focusing
  • Plasma materials-processing applications
  • Replication

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