MPCVD processing of titanium-diffused LiNbO3 waveguides

Optical characterisation and waveguide restoration

S. Trpkovski*, L. A. Bui, B. C. Gibson, S. T. Huntington, D. Simpson, E. Ampem-Lassen, J. R. Rabeau, A. Mitchell

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

Abstract

This paper presents some initial findings that explore the material properties of LiNbO3 which has been exposed to a Microwave Plasma-enhanced Chemical Vapor Deposition (MPCVD) environment. The LiNbO 3 was found to undergo a process known as 'reduction' when exposed to this environment. A technique was developed to reverse this process and recover the LiNbO3, which is a crucial first step towards the integration of diamond-based single photon sources with LiNbO3 waveguide technologies.

Original languageEnglish
Title of host publicationCOMMAD'06 - Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices
EditorsLorenzo Faraone, Sabine Betts, John Dell, Charlie Musca, Brett Nener, Gia Parish, Justin Wehner
Place of PublicationPiscataway, N.J
Pages253-255
Number of pages3
DOIs
Publication statusPublished - 2006
Externally publishedYes
Event2006 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD - 2006 - Perth, Australia
Duration: 6 Dec 20068 Dec 2006

Other

Other2006 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD - 2006
CountryAustralia
CityPerth
Period6/12/068/12/06

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Keywords

  • Diamond
  • LiNbO
  • MPCVD
  • Optical
  • Waveguide

Cite this

Trpkovski, S., Bui, L. A., Gibson, B. C., Huntington, S. T., Simpson, D., Ampem-Lassen, E., ... Mitchell, A. (2006). MPCVD processing of titanium-diffused LiNbO3 waveguides: Optical characterisation and waveguide restoration. In L. Faraone, S. Betts, J. Dell, C. Musca, B. Nener, G. Parish, & J. Wehner (Eds.), COMMAD'06 - Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices (pp. 253-255). [4429929] Piscataway, N.J. https://doi.org/10.1109/COMMAD.2006.4429929