MPCVD processing of titanium-diffused LiNbO3 waveguides: Optical characterisation and waveguide restoration

S. Trpkovski; L. A. Bui; B. C. Gibson; S. T. Huntington; D. Simpson; E. Ampem-Lassen; J. R. Rabeau; A. Mitchell

doi:10.1109/COMMAD.2006.4429929

MPCVD processing of titanium-diffused LiNbO3 waveguides: Optical characterisation and waveguide restoration

S. Trpkovski^*, L. A. Bui, B. C. Gibson, S. T. Huntington, D. Simpson, E. Ampem-Lassen, J. R. Rabeau, A. Mitchell

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

This paper presents some initial findings that explore the material properties of LiNbO₃ which has been exposed to a Microwave Plasma-enhanced Chemical Vapor Deposition (MPCVD) environment. The LiNbO ₃ was found to undergo a process known as 'reduction' when exposed to this environment. A technique was developed to reverse this process and recover the LiNbO₃, which is a crucial first step towards the integration of diamond-based single photon sources with LiNbO₃ waveguide technologies.

Original language	English
Title of host publication	COMMAD'06 - Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices
Editors	Lorenzo Faraone, Sabine Betts, John Dell, Charlie Musca, Brett Nener, Gia Parish, Justin Wehner
Place of Publication	Piscataway, N.J
Pages	253-255
Number of pages	3
DOIs	https://doi.org/10.1109/COMMAD.2006.4429929
Publication status	Published - 2006
Externally published	Yes
Event	2006 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD - 2006 - Perth, Australia Duration: 6 Dec 2006 → 8 Dec 2006

Other

Other	2006 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD - 2006
Country/Territory	Australia
City	Perth
Period	6/12/06 → 8/12/06

Keywords

Diamond
LiNbO
MPCVD
Optical
Waveguide

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10.1109/COMMAD.2006.4429929

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Trpkovski, S., Bui, L. A., Gibson, B. C., Huntington, S. T., Simpson, D., Ampem-Lassen, E., Rabeau, J. R., & Mitchell, A. (2006). MPCVD processing of titanium-diffused LiNbO3 waveguides: Optical characterisation and waveguide restoration. In L. Faraone, S. Betts, J. Dell, C. Musca, B. Nener, G. Parish, & J. Wehner (Eds.), COMMAD'06 - Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices (pp. 253-255). Article 4429929. https://doi.org/10.1109/COMMAD.2006.4429929

Trpkovski, S. ; Bui, L. A. ; Gibson, B. C. et al. / MPCVD processing of titanium-diffused LiNbO3 waveguides : Optical characterisation and waveguide restoration. COMMAD'06 - Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices. editor / Lorenzo Faraone ; Sabine Betts ; John Dell ; Charlie Musca ; Brett Nener ; Gia Parish ; Justin Wehner. Piscataway, N.J, 2006. pp. 253-255

@inproceedings{38fd76fa6b1b4d408f0af0d4bf3ba239,

title = "MPCVD processing of titanium-diffused LiNbO3 waveguides: Optical characterisation and waveguide restoration",

abstract = "This paper presents some initial findings that explore the material properties of LiNbO3 which has been exposed to a Microwave Plasma-enhanced Chemical Vapor Deposition (MPCVD) environment. The LiNbO 3 was found to undergo a process known as 'reduction' when exposed to this environment. A technique was developed to reverse this process and recover the LiNbO3, which is a crucial first step towards the integration of diamond-based single photon sources with LiNbO3 waveguide technologies.",

keywords = "Diamond, LiNbO, MPCVD, Optical, Waveguide",

author = "S. Trpkovski and Bui, \{L. A.\} and Gibson, \{B. C.\} and Huntington, \{S. T.\} and D. Simpson and E. Ampem-Lassen and Rabeau, \{J. R.\} and A. Mitchell",

year = "2006",

doi = "10.1109/COMMAD.2006.4429929",

language = "English",

isbn = "1424405785",

pages = "253--255",

editor = "Lorenzo Faraone and Sabine Betts and John Dell and Charlie Musca and Brett Nener and Gia Parish and Justin Wehner",

booktitle = "COMMAD'06 - Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices",

note = "2006 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD - 2006 ; Conference date: 06-12-2006 Through 08-12-2006",

}

Trpkovski, S, Bui, LA, Gibson, BC, Huntington, ST, Simpson, D, Ampem-Lassen, E, Rabeau, JR & Mitchell, A 2006, MPCVD processing of titanium-diffused LiNbO3 waveguides: Optical characterisation and waveguide restoration. in L Faraone, S Betts, J Dell, C Musca, B Nener, G Parish & J Wehner (eds), COMMAD'06 - Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices., 4429929, Piscataway, N.J, pp. 253-255, 2006 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD - 2006, Perth, Western Australia, Australia, 6/12/06. https://doi.org/10.1109/COMMAD.2006.4429929

MPCVD processing of titanium-diffused LiNbO3 waveguides: Optical characterisation and waveguide restoration. / Trpkovski, S.; Bui, L. A.; Gibson, B. C. et al.
COMMAD'06 - Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices. ed. / Lorenzo Faraone; Sabine Betts; John Dell; Charlie Musca; Brett Nener; Gia Parish; Justin Wehner. Piscataway, N.J, 2006. p. 253-255 4429929.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

TY - GEN

T1 - MPCVD processing of titanium-diffused LiNbO3 waveguides

T2 - 2006 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD - 2006

AU - Trpkovski, S.

AU - Bui, L. A.

AU - Gibson, B. C.

AU - Huntington, S. T.

AU - Simpson, D.

AU - Ampem-Lassen, E.

AU - Rabeau, J. R.

AU - Mitchell, A.

PY - 2006

Y1 - 2006

N2 - This paper presents some initial findings that explore the material properties of LiNbO3 which has been exposed to a Microwave Plasma-enhanced Chemical Vapor Deposition (MPCVD) environment. The LiNbO 3 was found to undergo a process known as 'reduction' when exposed to this environment. A technique was developed to reverse this process and recover the LiNbO3, which is a crucial first step towards the integration of diamond-based single photon sources with LiNbO3 waveguide technologies.

AB - This paper presents some initial findings that explore the material properties of LiNbO3 which has been exposed to a Microwave Plasma-enhanced Chemical Vapor Deposition (MPCVD) environment. The LiNbO 3 was found to undergo a process known as 'reduction' when exposed to this environment. A technique was developed to reverse this process and recover the LiNbO3, which is a crucial first step towards the integration of diamond-based single photon sources with LiNbO3 waveguide technologies.

KW - Diamond

KW - LiNbO

KW - MPCVD

KW - Optical

KW - Waveguide

UR - https://www.scopus.com/pages/publications/44849141171

U2 - 10.1109/COMMAD.2006.4429929

DO - 10.1109/COMMAD.2006.4429929

M3 - Conference proceeding contribution

AN - SCOPUS:44849141171

SN - 1424405785

SN - 9781424405787

SP - 253

EP - 255

BT - COMMAD'06 - Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices

A2 - Faraone, Lorenzo

A2 - Betts, Sabine

A2 - Dell, John

A2 - Musca, Charlie

A2 - Nener, Brett

A2 - Parish, Gia

A2 - Wehner, Justin

CY - Piscataway, N.J

Y2 - 6 December 2006 through 8 December 2006

ER -

Trpkovski S, Bui LA, Gibson BC, Huntington ST, Simpson D, Ampem-Lassen E et al. MPCVD processing of titanium-diffused LiNbO3 waveguides: Optical characterisation and waveguide restoration. In Faraone L, Betts S, Dell J, Musca C, Nener B, Parish G, Wehner J, editors, COMMAD'06 - Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices. Piscataway, N.J. 2006. p. 253-255. 4429929 doi: 10.1109/COMMAD.2006.4429929

MPCVD processing of titanium-diffused LiNbO3 waveguides: Optical characterisation and waveguide restoration

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Keywords

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