TY - JOUR
T1 - Multi-position measurable flow velocity sensor for microfluidic applications
AU - Hao, Yansheng
AU - Fang, Chaoying
AU - Yuan, Yapeng
AU - Okano, Kazunori
AU - Yasukuni, Ryohei
AU - Cheng, Shaokoon
AU - Tanaka, Yo
AU - Hosokawa, Yoichiroh
AU - Yang, Yang
AU - Li, Ming
AU - Yalikun, Yaxiaer
PY - 2023/1/15
Y1 - 2023/1/15
N2 - Here we developed an innovative flow sensor using ultrathin (i.e.,
4 μm
) glass sheet fabricated by femtosecond laser processing. The sensor can
quantify the flow velocity of liquid flows by measuring the
displacement and vibration frequency of the ultrathin glass sheet
induced by flows in the microchannel. The developed flow sensor is
transparent, chemically inert, and can measure water flows with a
velocity between 0.067 and 0.804 m/s (Reynolds numbers 3–36). The
displacement of the ultrathin glass sensor varying from 0.4 to
3.1 μm
has negligible influence on the fluid conditions in the microchannel.
Moreover, the sensitivity and dynamic range of the sensor can be readily
adjusted by optimizing geometric parameters, such as the aspect ratio
and thickness of the ultrathin glass sheet. Besides, the sensor is
capable of multiposition measurement to investigate the differences in
localized flow velocity within the microchannel. Compared with existing
cantilever-based flow velocity sensors, our developed sensor has a
higher sensitivity [409 mV/(m/s)], a larger measurement range
(0.067–0.804 m/s), and a smaller displacement range (0.4–
3.1 μm
), which is desirable for high-throughput microfluidics-based applications, such as cell separation and cell-based therapeutics.[Graphic presents]
AB - Here we developed an innovative flow sensor using ultrathin (i.e.,
4 μm
) glass sheet fabricated by femtosecond laser processing. The sensor can
quantify the flow velocity of liquid flows by measuring the
displacement and vibration frequency of the ultrathin glass sheet
induced by flows in the microchannel. The developed flow sensor is
transparent, chemically inert, and can measure water flows with a
velocity between 0.067 and 0.804 m/s (Reynolds numbers 3–36). The
displacement of the ultrathin glass sensor varying from 0.4 to
3.1 μm
has negligible influence on the fluid conditions in the microchannel.
Moreover, the sensitivity and dynamic range of the sensor can be readily
adjusted by optimizing geometric parameters, such as the aspect ratio
and thickness of the ultrathin glass sheet. Besides, the sensor is
capable of multiposition measurement to investigate the differences in
localized flow velocity within the microchannel. Compared with existing
cantilever-based flow velocity sensors, our developed sensor has a
higher sensitivity [409 mV/(m/s)], a larger measurement range
(0.067–0.804 m/s), and a smaller displacement range (0.4–
3.1 μm
), which is desirable for high-throughput microfluidics-based applications, such as cell separation and cell-based therapeutics.[Graphic presents]
UR - http://www.scopus.com/inward/record.url?scp=85144743322&partnerID=8YFLogxK
U2 - 10.1109/JSEN.2022.3225637
DO - 10.1109/JSEN.2022.3225637
M3 - Article
AN - SCOPUS:85144743322
SN - 1530-437X
VL - 23
SP - 1072
EP - 1080
JO - IEEE Sensors Journal
JF - IEEE Sensors Journal
IS - 2
ER -