Nanometrology of sub-wavelength circular holes in gold nanofilms using optical surface profilometry

D. J. Little, D. M. Kane

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionpeer-review

Abstract

Optical surface profilers are useful metrological instruments, however their application to nanometrology is hindered because ray-optic approximations are included in the physical model that relates measurand (irradiance profiles) to the height profile of the object surface [1-2]. Using optical surface profilometry for nanometrology is an attractive prospect because they are compatible with conventional optical systems, enabling in situ nano-characterisation of single particles to be performed in conjunction with other advanced optical microscopy techniques. In addition, optical surface profilers are capable of rapid measurement and require no sample preparation, allowing nano-characterisation to be performed with speed and flexibility in the laboratory.

Original languageEnglish
Title of host publication2013 Conference on Lasers & Electro-Optics Europe & International Quantum Electronics Conference (CLEO EUROPE/IQEC 2013)
Place of PublicationPiscataway, NJ
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages1-1
Number of pages1
ISBN (Electronic)9781479905942, 9781479905935
ISBN (Print)9781479905928
DOIs
Publication statusPublished - 2013
Event2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013 - Munich, Germany
Duration: 12 May 201316 May 2013

Other

Other2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013
CountryGermany
CityMunich
Period12/05/1316/05/13

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