Nanometrology of sub-wavelength circular holes in gold nanofilms using optical surface profilometry

D. J. Little; D. M. Kane

doi:10.1109/CLEOE-IQEC.2013.6801238

Nanometrology of sub-wavelength circular holes in gold nanofilms using optical surface profilometry

D. J. Little, D. M. Kane

MQ Photonics Research Centre

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

Optical surface profilers are useful metrological instruments, however their application to nanometrology is hindered because ray-optic approximations are included in the physical model that relates measurand (irradiance profiles) to the height profile of the object surface [1-2]. Using optical surface profilometry for nanometrology is an attractive prospect because they are compatible with conventional optical systems, enabling in situ nano-characterisation of single particles to be performed in conjunction with other advanced optical microscopy techniques. In addition, optical surface profilers are capable of rapid measurement and require no sample preparation, allowing nano-characterisation to be performed with speed and flexibility in the laboratory.

Original language	English
Title of host publication	2013 Conference on Lasers & Electro-Optics Europe & International Quantum Electronics Conference (CLEO EUROPE/IQEC 2013)
Place of Publication	Piscataway, NJ
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	1-1
Number of pages	1
ISBN (Electronic)	9781479905942, 9781479905935
ISBN (Print)	9781479905928
DOIs	https://doi.org/10.1109/CLEOE-IQEC.2013.6801238
Publication status	Published - 2013
Event	2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013 - Munich, Germany Duration: 12 May 2013 → 16 May 2013

Other

Other	2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013
Country/Territory	Germany
City	Munich
Period	12/05/13 → 16/05/13

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10.1109/CLEOE-IQEC.2013.6801238

Cite this

Little, D. J., & Kane, D. M. (2013). Nanometrology of sub-wavelength circular holes in gold nanofilms using optical surface profilometry. In 2013 Conference on Lasers & Electro-Optics Europe & International Quantum Electronics Conference (CLEO EUROPE/IQEC 2013) (pp. 1-1). [6801238] Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/CLEOE-IQEC.2013.6801238

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abstract = "Optical surface profilers are useful metrological instruments, however their application to nanometrology is hindered because ray-optic approximations are included in the physical model that relates measurand (irradiance profiles) to the height profile of the object surface [1-2]. Using optical surface profilometry for nanometrology is an attractive prospect because they are compatible with conventional optical systems, enabling in situ nano-characterisation of single particles to be performed in conjunction with other advanced optical microscopy techniques. In addition, optical surface profilers are capable of rapid measurement and require no sample preparation, allowing nano-characterisation to be performed with speed and flexibility in the laboratory.",

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Little, DJ & Kane, DM 2013, Nanometrology of sub-wavelength circular holes in gold nanofilms using optical surface profilometry. in 2013 Conference on Lasers & Electro-Optics Europe & International Quantum Electronics Conference (CLEO EUROPE/IQEC 2013)., 6801238, Institute of Electrical and Electronics Engineers (IEEE), Piscataway, NJ, pp. 1-1, 2013 Conference on Lasers and Electro-Optics Europe and International Quantum Electronics Conference, CLEO/Europe-IQEC 2013, Munich, Germany, 12/05/13. https://doi.org/10.1109/CLEOE-IQEC.2013.6801238

Nanometrology of sub-wavelength circular holes in gold nanofilms using optical surface profilometry. / Little, D. J.; Kane, D. M.

2013 Conference on Lasers & Electro-Optics Europe & International Quantum Electronics Conference (CLEO EUROPE/IQEC 2013). Piscataway, NJ : Institute of Electrical and Electronics Engineers (IEEE), 2013. p. 1-1 6801238.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

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Little DJ, Kane DM. Nanometrology of sub-wavelength circular holes in gold nanofilms using optical surface profilometry. In 2013 Conference on Lasers & Electro-Optics Europe & International Quantum Electronics Conference (CLEO EUROPE/IQEC 2013). Piscataway, NJ: Institute of Electrical and Electronics Engineers (IEEE). 2013. p. 1-1. 6801238 https://doi.org/10.1109/CLEOE-IQEC.2013.6801238

Nanometrology of sub-wavelength circular holes in gold nanofilms using optical surface profilometry

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