Abstract
Neutron transmutation doping (NTD) was studied as a means of compensating p-type Cd-doped GaAs. By introducing specific donor concentrations, the net acceptor level was measured and showed a progressive reduction. The NTD constant K = 0.32 donor atoms cm3/n cm2 was also measured. Radiation damage caused by neutron bombardment was annealed and no additional traps were generated.
Original language | English |
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Pages (from-to) | 430-436 |
Number of pages | 7 |
Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
Volume | 83 |
Issue number | 3 |
DOIs | |
Publication status | Published - Nov 1993 |