Neutron transmutation doping of liquid phase epitaxial gallium arsenide

D. Alexiev; K. S. A. Butcher; M. Edmondson; T. L. Tansley

doi:10.1016/0168-583X(94)95291-4

Neutron transmutation doping of liquid phase epitaxial gallium arsenide

D. Alexiev^*, K. S. A. Butcher, M. Edmondson, T. L. Tansley

^*Corresponding author for this work

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Abstract

Neutron transmutation doping (NTD) was studied as a means of compensating p-type liquid phase epitaxial (LPE) gallium arsenide. It is shown that such epitaxial layers can be transmuted into approximately 3 × 10¹³ cm^-3 n-type material, defect free after appropriate thermal annealing.

Original language	English
Pages (from-to)	288-292
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	86
Issue number	3-4
DOIs	https://doi.org/10.1016/0168-583X(94)95291-4
Publication status	Published - 2 Apr 1994

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title = "Neutron transmutation doping of liquid phase epitaxial gallium arsenide",

abstract = "Neutron transmutation doping (NTD) was studied as a means of compensating p-type liquid phase epitaxial (LPE) gallium arsenide. It is shown that such epitaxial layers can be transmuted into approximately 3 × 1013 cm-3 n-type material, defect free after appropriate thermal annealing.",

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AU - Butcher, K. S. A.

AU - Edmondson, M.

AU - Tansley, T. L.

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N2 - Neutron transmutation doping (NTD) was studied as a means of compensating p-type liquid phase epitaxial (LPE) gallium arsenide. It is shown that such epitaxial layers can be transmuted into approximately 3 × 1013 cm-3 n-type material, defect free after appropriate thermal annealing.

AB - Neutron transmutation doping (NTD) was studied as a means of compensating p-type liquid phase epitaxial (LPE) gallium arsenide. It is shown that such epitaxial layers can be transmuted into approximately 3 × 1013 cm-3 n-type material, defect free after appropriate thermal annealing.

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JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

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ER -

Neutron transmutation doping of liquid phase epitaxial gallium arsenide

Abstract

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