On-chip integration of ultra-thin glass cantilever for physical property measurement activated by femtosecond laser impulse

Tao Tang*, Yansheng Hao, Yigang Shen, Yo Tanaka, Ming Huang, Yoichiroh Hosokawa, Ming Li, Yaxiaer Yalikun

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionpeer-review

2 Citations (Scopus)

Abstract

Under the excitation of acoustic radiation, the amount of energy absorbed and rebounded by cells have the relationship with mechanical properties, e.g. stiffness, shape, weight and so on. In this paper, a femtosecond laser-activated micro-detector is designed to convert this relationship into an electrical signal. First, the acoustic radiation is generated by a femtosecond laser pulse in a microchannel and acts on neighbor cells / beads. Then, an ultra-thin glass sheet (UTGS)-based pressure sensor (cantilever) is fabricated at the bottom of the microfluidic chip to monitor changes in acoustic pressure during detection process. In this detection system, the pressure sensor is fabricated with a 10 μm UTGS in a shape of rectangular cantilever and functions like a detector to convert acoustic waves into shift response. Based on the amplitude of detected pulses, we can directly analyze the acoustic energy, coming from either femtosecond laser pulse or that remains after penetrating target cells. We have taken experiments on 10 μm beads and verified the applicability of this micro-detector, and the proposed method has great potential to be applied in label-free cell manipulation (i.e., sorting) as a detection mechanism.

Original languageEnglish
Title of host publication2020 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS)
Place of PublicationPiscataway, NJ
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages2780-2785
Number of pages6
ISBN (Electronic)9781728162126
ISBN (Print)9781728162133
DOIs
Publication statusPublished - 2020
Event2020 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2020 - Virtual, Las Vegas, United States
Duration: 25 Oct 202029 Oct 2020

Publication series

Name
ISSN (Print)2153-0858
ISSN (Electronic)2153-0866

Conference

Conference2020 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2020
CountryUnited States
CityVirtual, Las Vegas
Period25/10/2029/10/20

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