Optical emission spectroscopy system operating in the vacuum-ultraviolet spectral range lambda <100 nm−a semi-empirical determination of sensitivity

Robert J. Carman; Douglas J. Little; Deborah M. Kane

doi:10.1088/0957-0233/26/8/085203

Optical emission spectroscopy system operating in the vacuum-ultraviolet spectral range lambda <100 nm−a semi-empirical determination of sensitivity

Robert J. Carman, Douglas J. Little, Deborah M. Kane

MQ Photonics Research Centre

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

We have determined the wavelength dependent response of an optical emission spectroscopy system operating in the vacuum-ultraviolet region between λ = 30-100 nm, where broad-band light sources with calibrated spectral irradiance are generally unavailable. The system incorporates a constant-deviation VUV monochromator which utilises a single-element concave diffraction grating. An optical surface profiler is used to measure the groove geometry of the diffraction grating to provide detailed information for subsequent 2D numerical modelling of the diffraction efficiencies and the overall wavelength-dependent response curves.

Original language	English
Article number	085203
Pages (from-to)	1-5
Number of pages	5
Journal	Measurement Science and Technology
Volume	26
Issue number	8
DOIs	https://doi.org/10.1088/0957-0233/26/8/085203
Publication status	Published - 1 Aug 2015

Keywords

VUV spectroscopy
diffraction grating
monochromator
optical surface profiler
vacuum ultraviolet

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10.1088/0957-0233/26/8/085203

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title = "Optical emission spectroscopy system operating in the vacuum-ultraviolet spectral range lambda <100 nm−a semi-empirical determination of sensitivity",

abstract = "We have determined the wavelength dependent response of an optical emission spectroscopy system operating in the vacuum-ultraviolet region between λ = 30-100 nm, where broad-band light sources with calibrated spectral irradiance are generally unavailable. The system incorporates a constant-deviation VUV monochromator which utilises a single-element concave diffraction grating. An optical surface profiler is used to measure the groove geometry of the diffraction grating to provide detailed information for subsequent 2D numerical modelling of the diffraction efficiencies and the overall wavelength-dependent response curves.",

keywords = "VUV spectroscopy, diffraction grating, monochromator, optical surface profiler, vacuum ultraviolet",

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T1 - Optical emission spectroscopy system operating in the vacuum-ultraviolet spectral range lambda <100 nm−a semi-empirical determination of sensitivity

AU - Carman, Robert J.

AU - Little, Douglas J.

AU - Kane, Deborah M.

PY - 2015/8/1

Y1 - 2015/8/1

N2 - We have determined the wavelength dependent response of an optical emission spectroscopy system operating in the vacuum-ultraviolet region between λ = 30-100 nm, where broad-band light sources with calibrated spectral irradiance are generally unavailable. The system incorporates a constant-deviation VUV monochromator which utilises a single-element concave diffraction grating. An optical surface profiler is used to measure the groove geometry of the diffraction grating to provide detailed information for subsequent 2D numerical modelling of the diffraction efficiencies and the overall wavelength-dependent response curves.

AB - We have determined the wavelength dependent response of an optical emission spectroscopy system operating in the vacuum-ultraviolet region between λ = 30-100 nm, where broad-band light sources with calibrated spectral irradiance are generally unavailable. The system incorporates a constant-deviation VUV monochromator which utilises a single-element concave diffraction grating. An optical surface profiler is used to measure the groove geometry of the diffraction grating to provide detailed information for subsequent 2D numerical modelling of the diffraction efficiencies and the overall wavelength-dependent response curves.

KW - VUV spectroscopy

KW - diffraction grating

KW - monochromator

KW - optical surface profiler

KW - vacuum ultraviolet

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U2 - 10.1088/0957-0233/26/8/085203

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SP - 1

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JO - Measurement Science and Technology

JF - Measurement Science and Technology

SN - 0957-0233

IS - 8

M1 - 085203

ER -

Optical emission spectroscopy system operating in the vacuum-ultraviolet spectral range lambda <100 nm−a semi-empirical determination of sensitivity

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Keywords

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