Optical emission spectroscopy system operating in the vacuum-ultraviolet spectral range λ < 100 nm: a semi-empirical determination of sensitivity

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Abstract

We have determined the wavelength dependent response of an optical emission spectroscopy system operating in the vacuum-ultraviolet region between λ = 30-100 nm, where broad-band light sources with calibrated spectral irradiance are generally unavailable. The system incorporates a constant-deviation VUV monochromator which utilises a single-element concave diffraction grating. An optical surface profiler is used to measure the groove geometry of the diffraction grating to provide detailed information for subsequent 2D numerical modelling of the diffraction efficiencies and the overall wavelength-dependent response curves.

LanguageEnglish
Article number085203
Pages1-5
Number of pages5
JournalMeasurement Science and Technology
Volume26
Issue number8
DOIs
Publication statusPublished - 1 Aug 2015

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Optical emission spectroscopy
Diffraction Grating
Diffraction gratings
optical emission spectroscopy
gratings (spectra)
Ultraviolet
Spectroscopy
Vacuum
Wavelength
Monochromator
vacuum
Diffraction Efficiency
Diffraction efficiency
Monochromators
Dependent
sensitivity
Irradiance
Numerical Modeling
monochromators
irradiance

Cite this

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abstract = "We have determined the wavelength dependent response of an optical emission spectroscopy system operating in the vacuum-ultraviolet region between λ = 30-100 nm, where broad-band light sources with calibrated spectral irradiance are generally unavailable. The system incorporates a constant-deviation VUV monochromator which utilises a single-element concave diffraction grating. An optical surface profiler is used to measure the groove geometry of the diffraction grating to provide detailed information for subsequent 2D numerical modelling of the diffraction efficiencies and the overall wavelength-dependent response curves.",
author = "Carman, {Robert J.} and Little, {Douglas J.} and Kane, {Deborah M.}",
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AU - Little, Douglas J.

AU - Kane, Deborah M.

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AB - We have determined the wavelength dependent response of an optical emission spectroscopy system operating in the vacuum-ultraviolet region between λ = 30-100 nm, where broad-band light sources with calibrated spectral irradiance are generally unavailable. The system incorporates a constant-deviation VUV monochromator which utilises a single-element concave diffraction grating. An optical surface profiler is used to measure the groove geometry of the diffraction grating to provide detailed information for subsequent 2D numerical modelling of the diffraction efficiencies and the overall wavelength-dependent response curves.

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