Optical surface profilometry of low reflectance materials - Evaluation as a laser processing diagnostic

Adam M. Joyce, Deborah M. Kane, Richard J. Chater

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

3 Citations (Scopus)

Abstract

Optical surface profilometry is a technique that has advantages over other Profilometry techniques (stylus Profilometry, AFM) of being non-contact and being able to profile comparatively large areas in a single "z-scan". Thus, it is employed in monitoring surface quality and measuring surface form in high technology manufacturing processes and quality assurance, as well as in research and development contexts. Its application to optical materials has been limited due to issues relating to the low reflectance of the surfaces. Results of a feasibility study for profiling laser induced optical damage and "loose" microscopic sized pieces of optical material (either debris or particles introduced by design) on optical substrates, will be reported. Progress on developing successful strategies for making quantitative measurements on these difficult samples has been achieved.

Original languageEnglish
Title of host publicationProceedings of the 2nd Pacific International Conference on Applications of Lasers and Optics 2006
EditorsMilan Brandt, Erol Harvey
Place of PublicationOrlando, FL
PublisherLaser Institute of America
Pages406-410
Number of pages5
ISBN (Print)0912035846, 9780912035840
Publication statusPublished - Apr 2006
EventPICALO 2006 - 2nd Pacific International Conference on Applications of Laser and Optics - Melbourne, VIC, Australia
Duration: 3 Apr 20065 Apr 2006

Other

OtherPICALO 2006 - 2nd Pacific International Conference on Applications of Laser and Optics
CountryAustralia
CityMelbourne, VIC
Period3/04/065/04/06

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