Passivation layer on polyimide deposited by combined plasma immersion ion implantation and deposition and cathodic vacuum arc technique

Z J Han, B K Tay, J Y Sze, Thang Cao Ha

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)411-414
Number of pages4
JournalJournal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films
Issue number3
Publication statusPublished - 2007
Externally publishedYes

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