Passivation layer on polyimide deposited by combined plasma immersion ion implantation and deposition and cathodic vacuum arc technique

Z J Han, B K Tay, J Y Sze, Thang Cao Ha

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	411-414
Number of pages	4
Journal	Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films
Volume	25
Issue number	3
DOIs	https://doi.org/10.1116/1.2712196
Publication status	Published - 2007
Externally published	Yes

Access to Document

@article{093425e590324e55a5f852c01b4a83c1,

title = "Passivation layer on polyimide deposited by combined plasma immersion ion implantation and deposition and cathodic vacuum arc technique",

author = "Han, {Z J} and Tay, {B K} and Sze, {J Y} and Ha, {Thang Cao}",

year = "2007",

doi = "10.1116/1.2712196",

language = "English",

volume = "25",

pages = "411--414",

journal = "Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films",

issn = "0734-2101",

publisher = "American Institute of Physics",

number = "3",

}

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Passivation layer on polyimide deposited by combined plasma immersion ion implantation and deposition and cathodic vacuum arc technique

AU - Han, Z J

AU - Tay, B K

AU - Sze, J Y

AU - Ha, Thang Cao

PY - 2007

Y1 - 2007

U2 - 10.1116/1.2712196

DO - 10.1116/1.2712196

M3 - Article

SN - 0734-2101

VL - 25

SP - 411

EP - 414

JO - Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films

JF - Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films

IS - 3

ER -