@article{093425e590324e55a5f852c01b4a83c1,
title = "Passivation layer on polyimide deposited by combined plasma immersion ion implantation and deposition and cathodic vacuum arc technique",
author = "Han, \{Z J\} and Tay, \{B K\} and Sze, \{J Y\} and Ha, \{Thang Cao\}",
year = "2007",
doi = "10.1116/1.2712196",
language = "English",
volume = "25",
pages = "411--414",
journal = "Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films",
issn = "0734-2101",
publisher = "American Institute of Physics",
number = "3",
}