Performance analysisis of PZT (0.52/0.48) for high temperature and pressure sensing applications

M. Asadnia, A. G P Kottapalli, J. M. Miao, A. B. Randles, J. M. Tsai

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contributionpeer-review

Abstract

In an effort to improve the understanding of the behavior of PZT-based MEMS pressure sensor at high temperature and high pressure conditions, a PZT (0.52/0.48) circular microdiphragm pressure sensor is developed. The proposed sensor is characterized for high temperatures (390°C) and under oscillatory pressure.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Place of PublicationPiscataway, NJ
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages984-987
Number of pages4
ISBN (Electronic)9781467359832
ISBN (Print)9781467359818
DOIs
Publication statusPublished - 2013
Externally publishedYes
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: 16 Jun 201320 Jun 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
CountrySpain
CityBarcelona
Period16/06/1320/06/13

Keywords

  • High temperature sensing
  • low frequency sensing
  • Piezoelectric material characterization
  • Piezoelectric sensors

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