Performance analysisis of PZT (0.52/0.48) for high temperature and pressure sensing applications

M. Asadnia; A. G P Kottapalli; J. M. Miao; A. B. Randles; J. M. Tsai

doi:10.1109/Transducers.2013.6626934

Performance analysisis of PZT (0.52/0.48) for high temperature and pressure sensing applications

M. Asadnia, A. G P Kottapalli, J. M. Miao, A. B. Randles, J. M. Tsai

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

In an effort to improve the understanding of the behavior of PZT-based MEMS pressure sensor at high temperature and high pressure conditions, a PZT (0.52/0.48) circular microdiphragm pressure sensor is developed. The proposed sensor is characterized for high temperatures (390°C) and under oscillatory pressure.

Original language	English
Title of host publication	2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Place of Publication	Piscataway, NJ
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	984-987
Number of pages	4
ISBN (Electronic)	9781467359832
ISBN (Print)	9781467359818
DOIs	https://doi.org/10.1109/Transducers.2013.6626934
Publication status	Published - 2013
Externally published	Yes
Event	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013

Other

Other	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Country/Territory	Spain
City	Barcelona
Period	16/06/13 → 20/06/13

Keywords

High temperature sensing
low frequency sensing
Piezoelectric material characterization
Piezoelectric sensors

Access to Document

10.1109/Transducers.2013.6626934

Cite this

Asadnia, M., Kottapalli, A. G. P., Miao, J. M., Randles, A. B., & Tsai, J. M. (2013). Performance analysisis of PZT (0.52/0.48) for high temperature and pressure sensing applications. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 984-987). Article 6626934 Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/Transducers.2013.6626934

Asadnia, M. ; Kottapalli, A. G P ; Miao, J. M. et al. / Performance analysisis of PZT (0.52/0.48) for high temperature and pressure sensing applications. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. Piscataway, NJ : Institute of Electrical and Electronics Engineers (IEEE), 2013. pp. 984-987

@inproceedings{c8f1076763cb49d29b3a81f72a8f4b96,

title = "Performance analysisis of PZT (0.52/0.48) for high temperature and pressure sensing applications",

abstract = "In an effort to improve the understanding of the behavior of PZT-based MEMS pressure sensor at high temperature and high pressure conditions, a PZT (0.52/0.48) circular microdiphragm pressure sensor is developed. The proposed sensor is characterized for high temperatures (390°C) and under oscillatory pressure.",

keywords = "High temperature sensing, low frequency sensing, Piezoelectric material characterization, Piezoelectric sensors",

author = "M. Asadnia and Kottapalli, {A. G P} and Miao, {J. M.} and Randles, {A. B.} and Tsai, {J. M.}",

year = "2013",

doi = "10.1109/Transducers.2013.6626934",

language = "English",

isbn = "9781467359818",

pages = "984--987",

booktitle = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

address = "United States",

note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",

}

Asadnia, M, Kottapalli, AGP, Miao, JM, Randles, AB & Tsai, JM 2013, Performance analysisis of PZT (0.52/0.48) for high temperature and pressure sensing applications. in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013., 6626934, Institute of Electrical and Electronics Engineers (IEEE), Piscataway, NJ, pp. 984-987, 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6626934

Performance analysisis of PZT (0.52/0.48) for high temperature and pressure sensing applications. / Asadnia, M.; Kottapalli, A. G P; Miao, J. M. et al.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. Piscataway, NJ: Institute of Electrical and Electronics Engineers (IEEE), 2013. p. 984-987 6626934.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

TY - GEN

T1 - Performance analysisis of PZT (0.52/0.48) for high temperature and pressure sensing applications

AU - Asadnia, M.

AU - Kottapalli, A. G P

AU - Miao, J. M.

AU - Randles, A. B.

AU - Tsai, J. M.

PY - 2013

Y1 - 2013

N2 - In an effort to improve the understanding of the behavior of PZT-based MEMS pressure sensor at high temperature and high pressure conditions, a PZT (0.52/0.48) circular microdiphragm pressure sensor is developed. The proposed sensor is characterized for high temperatures (390°C) and under oscillatory pressure.

AB - In an effort to improve the understanding of the behavior of PZT-based MEMS pressure sensor at high temperature and high pressure conditions, a PZT (0.52/0.48) circular microdiphragm pressure sensor is developed. The proposed sensor is characterized for high temperatures (390°C) and under oscillatory pressure.

KW - High temperature sensing

KW - low frequency sensing

KW - Piezoelectric material characterization

KW - Piezoelectric sensors

UR - http://www.scopus.com/inward/record.url?scp=84891680438&partnerID=8YFLogxK

U2 - 10.1109/Transducers.2013.6626934

DO - 10.1109/Transducers.2013.6626934

M3 - Conference proceeding contribution

AN - SCOPUS:84891680438

SN - 9781467359818

SP - 984

EP - 987

BT - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

PB - Institute of Electrical and Electronics Engineers (IEEE)

CY - Piscataway, NJ

T2 - 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Y2 - 16 June 2013 through 20 June 2013

ER -

Asadnia M, Kottapalli AGP, Miao JM, Randles AB, Tsai JM. Performance analysisis of PZT (0.52/0.48) for high temperature and pressure sensing applications. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. Piscataway, NJ: Institute of Electrical and Electronics Engineers (IEEE). 2013. p. 984-987. 6626934 doi: 10.1109/Transducers.2013.6626934

Performance analysisis of PZT (0.52/0.48) for high temperature and pressure sensing applications

Abstract

Other

Keywords

Access to Document

Other files and links

Fingerprint

Cite this