Performance optimisation of a neon DBD excimer light source operating in the extreme-ultraviolet (84nm)

Research output: Contribution to journalMeeting abstract

Original languageEnglish
Pages (from-to)2-2
Number of pages1
JournalBulletin of the American Physical Society
Volume54
Issue number12
Publication statusPublished - 2009
Event62nd Annual Gaseous Electronics Conference - Saratoga Springs, New York
Duration: 20 Oct 200923 Oct 2009

Keywords

  • plasma
  • light source
  • vuv

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