Performance optimisation of a neon DBD excimer light source operating in the extreme-ultraviolet (84nm)

Robert Carman, Deborah M. Kane, Barry Ward

    Research output: Contribution to journalMeeting abstract

    Original languageEnglish
    Pages (from-to)2-2
    Number of pages1
    JournalBulletin of the American Physical Society
    Issue number12
    Publication statusPublished - 2009
    Event62nd Annual Gaseous Electronics Conference - Saratoga Springs, New York
    Duration: 20 Oct 200923 Oct 2009


    • plasma
    • light source
    • vuv

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