Performance optimisation of a neon DBD excimer light source operating in the extreme-ultraviolet (84nm)

Robert Carman, Deborah M. Kane, Barry Ward

Research output: Contribution to journal › Meeting abstract

Original language	English
Pages (from-to)	2-2
Number of pages	1
Journal	Bulletin of the American Physical Society
Volume	54
Issue number	12
Publication status	Published - 2009
Event	62nd Annual Gaseous Electronics Conference - Saratoga Springs, New York Duration: 20 Oct 2009 → 23 Oct 2009

Keywords

@article{cdcf21483a4347c2add9a4a2bb6f04db,

title = "Performance optimisation of a neon DBD excimer light source operating in the extreme-ultraviolet (84nm)",

keywords = "plasma, light source, vuv",

author = "Robert Carman and Kane, {Deborah M.} and Barry Ward",

year = "2009",

language = "English",

volume = "54",

pages = "2--2",

journal = "Bulletin of the American Physical Society",

issn = "0003-0503",

publisher = "American Physical Society",

number = "12",

note = "62nd Annual Gaseous Electronics Conference ; Conference date: 20-10-2009 Through 23-10-2009",

}

TY - JOUR

T1 - Performance optimisation of a neon DBD excimer light source operating in the extreme-ultraviolet (84nm)

AU - Carman, Robert

AU - Kane, Deborah M.

AU - Ward, Barry

PY - 2009

Y1 - 2009

KW - plasma

KW - light source

KW - vuv

M3 - Meeting abstract

SN - 0003-0503

VL - 54

SP - 2

EP - 2

JO - Bulletin of the American Physical Society

JF - Bulletin of the American Physical Society

IS - 12

T2 - 62nd Annual Gaseous Electronics Conference

Y2 - 20 October 2009 through 23 October 2009

ER -