Piezoelectric coefficient of InN films prepared by radio-frequency sputtering

M. Wintrebert-Fouquet*, K. S A Butcher, I. L. Guy, Z. Zheng

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    2 Citations (Scopus)


    An interferometric method has been used to measure the piezoelectric coefficient d33 in indium nitride films deposited by radio-frequency sputtering on borosilicate glass coated with gold. This low temperature growth technique has the advantage of being able to produce samples for piezoelectric measurements where the InN film is grown directly on an Au metal back contact, allowing the accurate measurement of the piezoelectric coefficient of the InN layer without any parasitic series resistance. The InN growth conditions are described, and both crystal and optical characterizations of the film are presented. The measured value of the coefficient was found to be 4.0 ± 0.1 pm V- 1.

    Original languageEnglish
    Pages (from-to)7267-7270
    Number of pages4
    JournalThin Solid Films
    Issue number21
    Publication statusPublished - 1 Sep 2008


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