Abstract
The paper reports the fabrication, characterization, and experimental results of a piezoelectric MEMS pressure sensor array for underwater sensing applications. An array of five PZT sensors is developed that can perform passive fish-like underwater sensing. The array is capable of locating underwater objects by transducing the pressure variations generated by moving objects. Individual sensors have a low foot-print of 1.8 × 1.8 mm and do not consume any power for their operation. The array's ability in locating a vibrating sphere stimulus underwater, is explained through proof-of-concept experiments.
Original language | English |
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Title of host publication | IEEE SENSORS 2012 - Proceedings |
Place of Publication | Piscataway, NJ |
Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
Pages | 822-825 |
Number of pages | 4 |
ISBN (Electronic) | 9781457717659, 9781457717673 |
ISBN (Print) | 9781457717666 |
DOIs | |
Publication status | Published - 2012 |
Externally published | Yes |
Event | 11th IEEE SENSORS 2012 Conference - Taipei, Taiwan Duration: 28 Oct 2012 → 31 Oct 2012 |
Other
Other | 11th IEEE SENSORS 2012 Conference |
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Country/Territory | Taiwan |
City | Taipei |
Period | 28/10/12 → 31/10/12 |