Piezoelectricity in indium nitride

I. L. Guy; Z. Zheng; M. Wintrebert-Fouquet; K. S A Butcher; P. Chen; T. L. Tansley

doi:10.1016/j.jcrysgro.2004.05.035

Piezoelectricity in indium nitride

I. L. Guy, Z. Zheng, M. Wintrebert-Fouquet, K. S A Butcher^*, P. Chen, T. L. Tansley

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

An interferometric method has been used to measure the piezoelectric coefficient d₃₃ in thin, InN layers grown by remote plasma-enhanced chemical vapour deposition. The measured value of the coefficient varies from around 3.1 to 4.7pmV^-1. Theoretical predictions for these coefficients are scarce, but these values are significantly lower than those which are available. The discrepancy arises largely from the clamping of the film by the substrate, but may also be due to defects within the material.

Original language	English
Pages (from-to)	72-76
Number of pages	5
Journal	Journal of Crystal Growth
Volume	269
Issue number	1
DOIs	https://doi.org/10.1016/j.jcrysgro.2004.05.035
Publication status	Published - 15 Aug 2004

Keywords

A1. Polarization
B1. Nitride
B2. Piezoelectric materials
B2. Semiconducting indium compounds

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10.1016/j.jcrysgro.2004.05.035

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@article{a9ece91bac1b491d8b86ed78eaea9f59,

title = "Piezoelectricity in indium nitride",

abstract = "An interferometric method has been used to measure the piezoelectric coefficient d33 in thin, InN layers grown by remote plasma-enhanced chemical vapour deposition. The measured value of the coefficient varies from around 3.1 to 4.7pmV-1. Theoretical predictions for these coefficients are scarce, but these values are significantly lower than those which are available. The discrepancy arises largely from the clamping of the film by the substrate, but may also be due to defects within the material.",

keywords = "A1. Polarization, B1. Nitride, B2. Piezoelectric materials, B2. Semiconducting indium compounds",

author = "Guy, \{I. L.\} and Z. Zheng and M. Wintrebert-Fouquet and Butcher, \{K. S A\} and P. Chen and Tansley, \{T. L.\}",

year = "2004",

month = aug,

day = "15",

doi = "10.1016/j.jcrysgro.2004.05.035",

language = "English",

volume = "269",

pages = "72--76",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier",

number = "1",

}

TY - JOUR

T1 - Piezoelectricity in indium nitride

AU - Guy, I. L.

AU - Zheng, Z.

AU - Wintrebert-Fouquet, M.

AU - Butcher, K. S A

AU - Chen, P.

AU - Tansley, T. L.

PY - 2004/8/15

Y1 - 2004/8/15

N2 - An interferometric method has been used to measure the piezoelectric coefficient d33 in thin, InN layers grown by remote plasma-enhanced chemical vapour deposition. The measured value of the coefficient varies from around 3.1 to 4.7pmV-1. Theoretical predictions for these coefficients are scarce, but these values are significantly lower than those which are available. The discrepancy arises largely from the clamping of the film by the substrate, but may also be due to defects within the material.

AB - An interferometric method has been used to measure the piezoelectric coefficient d33 in thin, InN layers grown by remote plasma-enhanced chemical vapour deposition. The measured value of the coefficient varies from around 3.1 to 4.7pmV-1. Theoretical predictions for these coefficients are scarce, but these values are significantly lower than those which are available. The discrepancy arises largely from the clamping of the film by the substrate, but may also be due to defects within the material.

KW - A1. Polarization

KW - B1. Nitride

KW - B2. Piezoelectric materials

KW - B2. Semiconducting indium compounds

UR - https://www.scopus.com/pages/publications/3342995198

U2 - 10.1016/j.jcrysgro.2004.05.035

DO - 10.1016/j.jcrysgro.2004.05.035

M3 - Article

AN - SCOPUS:3342995198

SN - 0022-0248

VL - 269

SP - 72

EP - 76

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 1

ER -

Piezoelectricity in indium nitride

Abstract

Keywords

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