Abstract
Using electron beam lithography we have fabricated arrays of metallic and non-metallic planar chiral structures on silicon substrates, and observed the pronounced effects of their chirality on the polarization states of the diffracted light in the transmission regime. Significant differences in polarization properties were observed between metallic and polymer structures, most notably in the degree of induced ellipticity for the diffracted light.
Original language | English |
---|---|
Pages (from-to) | 367-371 |
Number of pages | 5 |
Journal | Microelectronic Engineering |
Volume | 73-74 |
DOIs | |
Publication status | Published - Jun 2004 |
Externally published | Yes |
Keywords
- planar chirality
- optical activity
- nanostructures