Polymer MEMS pressure sensor arrays for fish-like underwater sensing applications

A. G P Kottapalli*, M. Asadnia, J. M. Miao, C. W. Tan, G. Barbastathis, M. Triantafyllou

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)

Abstract

Blind cave fish are capable of sensing flows and movements of nearby objects even in dark and murky water conditions with the help of arrays of pressure-gradient sensors present on their bodies called lateral-lines. To emulate this functionality of lateral-lines for autonomous underwater vehicles, an array of polymer MEMS pressure sensors have been developed that can transduce underwater pressure variations generated by moving objects. Individual sensors are fabricated using liquid crystal polymer as a membrane material, which gives high robustness and reliability, and higher sensitivity compared with its silicon counterparts. The individual sensor in the array achieves a sensitivity of 90 mV/(m/s) with a high resolution of 25 mm/s. The underwater object detection capability of the array is demonstrated through proof-of-concept experiments. The array is capable of determining the velocity and distinguishing various distances of an underwater stimulus with high accuracy and repeatability.

Original languageEnglish
Pages (from-to)1189-1192
Number of pages4
JournalMicro and Nano Letters
Volume7
Issue number12
DOIs
Publication statusPublished - Dec 2012
Externally publishedYes

Fingerprint Dive into the research topics of 'Polymer MEMS pressure sensor arrays for fish-like underwater sensing applications'. Together they form a unique fingerprint.

Cite this