A review of the current state of the art of micromachining with nanosecond lasers is given. In particular, some of the high quality results achieved using copper vapor lasers with output powers up to 50 W and Q-switched solid state lasers operating in the kHz repetition rate regime with pulse durations of order 20-40 ns are described. Examples of the drilling of hard nonmetal materials such as alumina ceramics and diamond are shown.
|Number of pages||1|
|Journal||Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest|
|Publication status||Published - 2000|