The adhesion of aluminum nitride films was improved via the treatment of mercury cadmium telluride surfaces with ultraviolet light while under vacuum and prior to film deposition. SIMS showed that ultraviolet treatment removed adsorbates from the mercury cadmium telluride interface which would otherwise have weakened the bonding at the film interface. The electrical properties of the interfaces created by these treatments were found to be comparable to those of anodic oxides.
|Number of pages||7|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - Jan 2001|