This paper provides the measurement results of the Chua’s circuit manufactured using an InGaAs pHEMT process. The designed circuit was capable of producing both, harmonic and chaotic oscillations. The circuit’s equilibrium points were estimated from the measured time-domain signals and the variation in the coordinates of those points was studied. It was found that equilibria depend on supply voltage and reticle location implying high sensitivity of the designed circuit. Equilibrium points are shown to be able to give insight into manufacturing process state and variation of thereof.
|Title of host publication||Proceedings of CS MANTECH Conference, May 19th - 22nd, 2014, Denver, Colorado, USA|
|Place of Publication||United States|
|Number of pages||4|
|Publication status||Published - 2014|
|Event||International Conference on Compound Semiconductor Manufacturing Technology (CS MANTECH 2014) - Denver, Colorado|
Duration: 19 May 2014 → 22 May 2014
|Conference||International Conference on Compound Semiconductor Manufacturing Technology (CS MANTECH 2014)|
|Period||19/05/14 → 22/05/14|
- Chua’s Circuit
- Chaotic Oscillator
- Semiconductor Process Control
- Circuit Control Monitor
Kuxa, E., Parker, A. E., Mahon, S. J., Dadello, A., Wang, W-K., & Heimlich, M. C. (2014). Process control in GaAs manufacturing using Chua’s circuit. In Proceedings of CS MANTECH Conference, May 19th - 22nd, 2014, Denver, Colorado, USA (pp. 293-296). United States: CSManTech.