Process control in GaAs manufacturing using Chua’s circuit

Evgeny Kuxa, Anthony E. Parker, Simon J. Mahon, Anna Dadello, Wen-Kai Wang, Michael C. Heimlich

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

Abstract

This paper provides the measurement results of the Chua’s circuit manufactured using an InGaAs pHEMT process. The designed circuit was capable of producing both, harmonic and chaotic oscillations. The circuit’s equilibrium points were estimated from the measured time-domain signals and the variation in the coordinates of those points was studied. It was found that equilibria depend on supply voltage and reticle location implying high sensitivity of the designed circuit. Equilibrium points are shown to be able to give insight into manufacturing process state and variation of thereof.
Original languageEnglish
Title of host publicationProceedings of CS MANTECH Conference, May 19th - 22nd, 2014, Denver, Colorado, USA
Place of PublicationUnited States
PublisherCSManTech
Pages293-296
Number of pages4
Publication statusPublished - 2014
EventInternational Conference on Compound Semiconductor Manufacturing Technology (CS MANTECH 2014) - Denver, Colorado
Duration: 19 May 201422 May 2014

Conference

ConferenceInternational Conference on Compound Semiconductor Manufacturing Technology (CS MANTECH 2014)
CityDenver, Colorado
Period19/05/1422/05/14

Keywords

  • Chua’s Circuit
  • Chaotic Oscillator
  • Semiconductor Process Control
  • Circuit Control Monitor

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