Process control in GaAs manufacturing using Chua’s circuit

Evgeny Kuxa; Anthony E. Parker; Simon J. Mahon; Anna Dadello; Wen-Kai Wang; Michael C. Heimlich

Process control in GaAs manufacturing using Chua’s circuit

Evgeny Kuxa, Anthony E. Parker, Simon J. Mahon, Anna Dadello, Wen-Kai Wang, Michael C. Heimlich

School of Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution

Abstract

This paper provides the measurement results of the Chua’s circuit manufactured using an InGaAs pHEMT process. The designed circuit was capable of producing both, harmonic and chaotic oscillations. The circuit’s equilibrium points were estimated from the measured time-domain signals and the variation in the coordinates of those points was studied. It was found that equilibria depend on supply voltage and reticle location implying high sensitivity of the designed circuit. Equilibrium points are shown to be able to give insight into manufacturing process state and variation of thereof.

Original language	English
Title of host publication	Proceedings of CS MANTECH Conference, May 19th - 22nd, 2014, Denver, Colorado, USA
Place of Publication	United States
Publisher	CSManTech
Pages	293-296
Number of pages	4
Publication status	Published - 2014
Event	International Conference on Compound Semiconductor Manufacturing Technology (CS MANTECH 2014) - Denver, Colorado Duration: 19 May 2014 → 22 May 2014

Conference

Conference	International Conference on Compound Semiconductor Manufacturing Technology (CS MANTECH 2014)
City	Denver, Colorado
Period	19/05/14 → 22/05/14

Keywords

Chua’s Circuit
Chaotic Oscillator
Semiconductor Process Control
Circuit Control Monitor

Cite this

@inproceedings{119438f9860a4ab3a1fa02a7cda49a2a,

title = "Process control in GaAs manufacturing using Chua{\textquoteright}s circuit",

abstract = "This paper provides the measurement results of the Chua{\textquoteright}s circuit manufactured using an InGaAs pHEMT process. The designed circuit was capable of producing both, harmonic and chaotic oscillations. The circuit{\textquoteright}s equilibrium points were estimated from the measured time-domain signals and the variation in the coordinates of those points was studied. It was found that equilibria depend on supply voltage and reticle location implying high sensitivity of the designed circuit. Equilibrium points are shown to be able to give insight into manufacturing process state and variation of thereof.",

keywords = "Chua{\textquoteright}s Circuit, Chaotic Oscillator, Semiconductor Process Control, Circuit Control Monitor",

author = "Evgeny Kuxa and Parker, {Anthony E.} and Mahon, {Simon J.} and Anna Dadello and Wen-Kai Wang and Heimlich, {Michael C.}",

year = "2014",

language = "English",

pages = "293--296",

booktitle = "Proceedings of CS MANTECH Conference, May 19th - 22nd, 2014, Denver, Colorado, USA",

publisher = "CSManTech",

note = "International Conference on Compound Semiconductor Manufacturing Technology (CS MANTECH 2014) ; Conference date: 19-05-2014 Through 22-05-2014",

}

Kuxa, E, Parker, AE, Mahon, SJ, Dadello, A, Wang, W-K & Heimlich, MC 2014, Process control in GaAs manufacturing using Chua’s circuit. in Proceedings of CS MANTECH Conference, May 19th - 22nd, 2014, Denver, Colorado, USA. CSManTech, United States, pp. 293-296, International Conference on Compound Semiconductor Manufacturing Technology (CS MANTECH 2014), Denver, Colorado, 19/05/14.

TY - GEN

T1 - Process control in GaAs manufacturing using Chua’s circuit

AU - Kuxa, Evgeny

AU - Parker, Anthony E.

AU - Mahon, Simon J.

AU - Dadello, Anna

AU - Wang, Wen-Kai

AU - Heimlich, Michael C.

PY - 2014

Y1 - 2014

N2 - This paper provides the measurement results of the Chua’s circuit manufactured using an InGaAs pHEMT process. The designed circuit was capable of producing both, harmonic and chaotic oscillations. The circuit’s equilibrium points were estimated from the measured time-domain signals and the variation in the coordinates of those points was studied. It was found that equilibria depend on supply voltage and reticle location implying high sensitivity of the designed circuit. Equilibrium points are shown to be able to give insight into manufacturing process state and variation of thereof.

AB - This paper provides the measurement results of the Chua’s circuit manufactured using an InGaAs pHEMT process. The designed circuit was capable of producing both, harmonic and chaotic oscillations. The circuit’s equilibrium points were estimated from the measured time-domain signals and the variation in the coordinates of those points was studied. It was found that equilibria depend on supply voltage and reticle location implying high sensitivity of the designed circuit. Equilibrium points are shown to be able to give insight into manufacturing process state and variation of thereof.

KW - Chua’s Circuit

KW - Chaotic Oscillator

KW - Semiconductor Process Control

KW - Circuit Control Monitor

M3 - Conference proceeding contribution

SP - 293

EP - 296

BT - Proceedings of CS MANTECH Conference, May 19th - 22nd, 2014, Denver, Colorado, USA

PB - CSManTech

CY - United States

T2 - International Conference on Compound Semiconductor Manufacturing Technology (CS MANTECH 2014)

Y2 - 19 May 2014 through 22 May 2014

ER -

Process control in GaAs manufacturing using Chua’s circuit

Abstract

Conference

Keywords

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