Progress in high-speed UV micro-machining with high repetition rate frequency-doubled copper vapour lasers

Donald J. Ramsay, Alison C. J. Glover, David W. Coutts, Jim A. Piper

Research output: Chapter in Book/Report/Conference proceedingConference proceeding contribution

Abstract

The copper vapor laser (CVL) is an efficient, high average power, high pulse rate visible laser, emitting in the green and the yellow. Previous applications of CVLs have been limited to those requiring a high power visible laser source but with no specific need for high output beam quality. Recently we have made substantial progress in understanding the factors that influence CVL beam quality. As a result we are now able to achieve efficient non-linear frequency conversion to produce a number of ultraviolet wavelengths with near- diffraction limited beam quality. The high repetition rate and low divergence uv output of the frequency-doubled CVL makes it an attractive alternative to the excimer laser for a number of applications, including high-speed precision hole-drilling, cutting and scoring in polymers and for deep-uv photolithography. We report here recent developments that have led to efficient generation of uv wavelengths from copper vapor lasers and we demonstrate its potential as a laser source for high-speed precision ultraviolet micromachining.
Original languageEnglish
Title of host publicationLaser materials processing - ICALEO 94
EditorsT. D. McCay, A. Matsunawa, H. Hugel
PublisherSPIE
Pages343-351
Number of pages9
ISBN (Print)0912035528
DOIs
Publication statusPublished - 1994
EventICALEO 94 - Laser Materials Processing - ORLANDO
Duration: 17 Oct 199420 Oct 1994

Publication series

NamePROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
PublisherSPIE - INT SOC OPTICAL ENGINEERING
Volume2500

Conference

ConferenceICALEO 94 - Laser Materials Processing
CityORLANDO
Period17/10/9420/10/94

Cite this

Ramsay, D. J., Glover, A. C. J., Coutts, D. W., & Piper, J. A. (1994). Progress in high-speed UV micro-machining with high repetition rate frequency-doubled copper vapour lasers. In T. D. McCay, A. Matsunawa, & H. Hugel (Eds.), Laser materials processing - ICALEO 94 (pp. 343-351). (PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE); Vol. 2500). SPIE. https://doi.org/10.1117/12.167594