Progress in high-speed UV micro-machining with high repetition rate frequency-doubled copper vapour lasers

Donald J. Ramsay; Alison C. J. Glover; David W. Coutts; Jim A. Piper

doi:10.1117/12.167594

Progress in high-speed UV micro-machining with high repetition rate frequency-doubled copper vapour lasers

Donald J. Ramsay, Alison C. J. Glover, David W. Coutts, Jim A. Piper

Department of Physics and Astronomy

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

Abstract

The copper vapor laser (CVL) is an efficient, high average power, high pulse rate visible laser, emitting in the green and the yellow. Previous applications of CVLs have been limited to those requiring a high power visible laser source but with no specific need for high output beam quality. Recently we have made substantial progress in understanding the factors that influence CVL beam quality. As a result we are now able to achieve efficient non-linear frequency conversion to produce a number of ultraviolet wavelengths with near- diffraction limited beam quality. The high repetition rate and low divergence uv output of the frequency-doubled CVL makes it an attractive alternative to the excimer laser for a number of applications, including high-speed precision hole-drilling, cutting and scoring in polymers and for deep-uv photolithography. We report here recent developments that have led to efficient generation of uv wavelengths from copper vapor lasers and we demonstrate its potential as a laser source for high-speed precision ultraviolet micromachining.

Original language	English
Title of host publication	Laser materials processing - ICALEO 94
Editors	T. D. McCay, A. Matsunawa, H. Hugel
Publisher	SPIE
Pages	343-351
Number of pages	9
ISBN (Print)	0912035528
DOIs	https://doi.org/10.1117/12.167594
Publication status	Published - 1994
Event	ICALEO 94 - Laser Materials Processing - ORLANDO Duration: 17 Oct 1994 → 20 Oct 1994

Publication series

Name	PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
Publisher	SPIE - INT SOC OPTICAL ENGINEERING
Volume	2500

Conference

Conference	ICALEO 94 - Laser Materials Processing
City	ORLANDO
Period	17/10/94 → 20/10/94

Access to Document

10.1117/12.167594

Cite this

Ramsay, D. J., Glover, A. C. J., Coutts, D. W., & Piper, J. A. (1994). Progress in high-speed UV micro-machining with high repetition rate frequency-doubled copper vapour lasers. In T. D. McCay, A. Matsunawa, & H. Hugel (Eds.), Laser materials processing - ICALEO 94 (pp. 343-351). (PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE); Vol. 2500). SPIE. https://doi.org/10.1117/12.167594

Ramsay, Donald J. ; Glover, Alison C. J. ; Coutts, David W. ; Piper, Jim A. / Progress in high-speed UV micro-machining with high repetition rate frequency-doubled copper vapour lasers. Laser materials processing - ICALEO 94. editor / T. D. McCay ; A. Matsunawa ; H. Hugel. SPIE, 1994. pp. 343-351 (PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)).

@inproceedings{064f4b5aebc34283bd11fc0f66b21b80,

title = "Progress in high-speed UV micro-machining with high repetition rate frequency-doubled copper vapour lasers",

abstract = "The copper vapor laser (CVL) is an efficient, high average power, high pulse rate visible laser, emitting in the green and the yellow. Previous applications of CVLs have been limited to those requiring a high power visible laser source but with no specific need for high output beam quality. Recently we have made substantial progress in understanding the factors that influence CVL beam quality. As a result we are now able to achieve efficient non-linear frequency conversion to produce a number of ultraviolet wavelengths with near- diffraction limited beam quality. The high repetition rate and low divergence uv output of the frequency-doubled CVL makes it an attractive alternative to the excimer laser for a number of applications, including high-speed precision hole-drilling, cutting and scoring in polymers and for deep-uv photolithography. We report here recent developments that have led to efficient generation of uv wavelengths from copper vapor lasers and we demonstrate its potential as a laser source for high-speed precision ultraviolet micromachining. ",

author = "Ramsay, {Donald J.} and Glover, {Alison C. J.} and Coutts, {David W.} and Piper, {Jim A.}",

year = "1994",

doi = "10.1117/12.167594",

language = "English",

isbn = "0912035528",

series = "PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)",

publisher = "SPIE",

pages = "343--351",

editor = "McCay, {T. D.} and A. Matsunawa and H. Hugel",

booktitle = "Laser materials processing - ICALEO 94",

address = "United States",

note = "ICALEO 94 - Laser Materials Processing ; Conference date: 17-10-1994 Through 20-10-1994",

}

Ramsay, DJ, Glover, ACJ, Coutts, DW & Piper, JA 1994, Progress in high-speed UV micro-machining with high repetition rate frequency-doubled copper vapour lasers. in TD McCay, A Matsunawa & H Hugel (eds), Laser materials processing - ICALEO 94. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE), vol. 2500, SPIE, pp. 343-351, ICALEO 94 - Laser Materials Processing, ORLANDO, 17/10/94. https://doi.org/10.1117/12.167594

Progress in high-speed UV micro-machining with high repetition rate frequency-doubled copper vapour lasers. / Ramsay, Donald J.; Glover, Alison C. J.; Coutts, David W.; Piper, Jim A.

Laser materials processing - ICALEO 94. ed. / T. D. McCay; A. Matsunawa; H. Hugel. SPIE, 1994. p. 343-351 (PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE); Vol. 2500).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceeding contribution › peer-review

TY - GEN

T1 - Progress in high-speed UV micro-machining with high repetition rate frequency-doubled copper vapour lasers

AU - Ramsay, Donald J.

AU - Glover, Alison C. J.

AU - Coutts, David W.

AU - Piper, Jim A.

PY - 1994

Y1 - 1994

N2 - The copper vapor laser (CVL) is an efficient, high average power, high pulse rate visible laser, emitting in the green and the yellow. Previous applications of CVLs have been limited to those requiring a high power visible laser source but with no specific need for high output beam quality. Recently we have made substantial progress in understanding the factors that influence CVL beam quality. As a result we are now able to achieve efficient non-linear frequency conversion to produce a number of ultraviolet wavelengths with near- diffraction limited beam quality. The high repetition rate and low divergence uv output of the frequency-doubled CVL makes it an attractive alternative to the excimer laser for a number of applications, including high-speed precision hole-drilling, cutting and scoring in polymers and for deep-uv photolithography. We report here recent developments that have led to efficient generation of uv wavelengths from copper vapor lasers and we demonstrate its potential as a laser source for high-speed precision ultraviolet micromachining.

AB - The copper vapor laser (CVL) is an efficient, high average power, high pulse rate visible laser, emitting in the green and the yellow. Previous applications of CVLs have been limited to those requiring a high power visible laser source but with no specific need for high output beam quality. Recently we have made substantial progress in understanding the factors that influence CVL beam quality. As a result we are now able to achieve efficient non-linear frequency conversion to produce a number of ultraviolet wavelengths with near- diffraction limited beam quality. The high repetition rate and low divergence uv output of the frequency-doubled CVL makes it an attractive alternative to the excimer laser for a number of applications, including high-speed precision hole-drilling, cutting and scoring in polymers and for deep-uv photolithography. We report here recent developments that have led to efficient generation of uv wavelengths from copper vapor lasers and we demonstrate its potential as a laser source for high-speed precision ultraviolet micromachining.

U2 - 10.1117/12.167594

DO - 10.1117/12.167594

M3 - Conference proceeding contribution

SN - 0912035528

T3 - PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)

SP - 343

EP - 351

BT - Laser materials processing - ICALEO 94

A2 - McCay, T. D.

A2 - Matsunawa, A.

A2 - Hugel, H.

PB - SPIE

T2 - ICALEO 94 - Laser Materials Processing

Y2 - 17 October 1994 through 20 October 1994

ER -

Ramsay DJ, Glover ACJ, Coutts DW, Piper JA. Progress in high-speed UV micro-machining with high repetition rate frequency-doubled copper vapour lasers. In McCay TD, Matsunawa A, Hugel H, editors, Laser materials processing - ICALEO 94. SPIE. 1994. p. 343-351. (PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)). https://doi.org/10.1117/12.167594